Hinf Controller Design for High-Performance Scanning Tunneling Microscope
Résumé
Ultrahigh positioning accuracy with high bandwidths are the great challenges in the field of nanopositioning and scanning systems. This article talks about the controller design for a closed-loop scanning tunneling microscope to deal with such challenges, considering fast continuous variations in sample surface with the presence of noise in the loop. The desired performances are imposed on the closed-loop sensitivity functions using appropriate weighting functions and then a mixed-sensitivity H¥ controller is designed. The results are compared with the conventional proportional-integral control design commonly used by the scanning probe community, underlining the improvements obtained in terms of high precision and high bandwidth.