A dual axis CMOS micromachined convective thermal accelerometer

Alexandra Garraud (1) , Alain Giani (1, 2) , Philippe Combette (1, 2) , Benoit Charlot (1, 2) , Mathieu Richard (3)

1 IES - Institut d’Electronique et des Systèmes
2 M2A - Matériaux, MicroCapteurs et Acoustique
3 EVASION - Virtual environments for animation and image synthesis of natural objects

Domaines: Electronique

Alexandra Garraud, Alain Giani, Philippe Combette, Benoit Charlot, Mathieu Richard. A dual axis CMOS micromachined convective thermal accelerometer. Sensors and Actuators A: Physical , 2011, 170 (1-2), pp.44 - 50. ⟨10.1016/j.sna.2011.05.029⟩. ⟨hal-01616085⟩