Micropyrotechnics, a new technology for making energetic microsystems: review and prospective

Carole Rossi (1) , Daniel Estève

1 LAAS - Laboratoire d'analyse et d'architecture des systèmes

A review of the micropyrotechnics related works is done. Micropyrotechnics is the integration of an energetic material into microsystem, for which the thermal, mechanical and chemical energy released by decomposition can be exploited. After a state-of-the art of micropyrotechnics and its application to microsystems, authors try to identify obvious difficulties and insufficiencies that may require future work, particularly in terms of the development of new materials, new modelling tools and new processes for integration into microsystems. A section is dedicated to the current micropyrotechnic applications including emerging ones. In conclusion, the perspectives of this discipline are discussed and the authors try to give some guidelines for future investigations.

Mots clés: Microsystem; Micropyrotechnic; Microactuation; Gas generator; Microthruster; Energetic material

Domaines: Micro et nanotechnologies/Microélectronique

Carole Rossi, Daniel Estève. Micropyrotechnics, a new technology for making energetic microsystems: review and prospective. Sensors and Actuators A: Physical , 2005, Volume 120, (Issue 2), pp.Pages 297-310. ⟨hal-00150261⟩