Solving functional reliability issue for an optical electrostatic switch

Henri Camon (1) , Christian Ganibal (2) , N. Rapahoz (3) , M. Trzmiel (3) , C. Pisella (3) , C. Martinez (4) , K. Gilbert (4) , S. Valette (4)

1 LAAS-MIS
2 LAAS-II
3 Tronic's Microsystems Tronic's Microsystems Crolles
4 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information

In this paper, we report the advantage of using AC actuating signal for driving MEMS actuators instead of DC voltages. The study is based upon micro mirror devices used in digital mode for optical switching operation. When the pull-in effect is used, charge injection occurs when the micro mirror is maintained in the deflected position. To avoid this effect, a geometrical solution is to realize grounded landing electrodes which are electro-statically separated from the control electrodes. Another solution is the use of AC signal which eliminates charge injection particularly if a bipolar signal is used. Long term experiments have demonstrated the reliability of such a signal command to avoid injection of electric charges.

Mots clés: Design and test techniques for MEMS

Domaines: Autre [cs.OH]; Architectures Matérielles [cs.AR]

Henri Camon, Christian Ganibal, N. Rapahoz, M. Trzmiel, C. Pisella, et al.. Solving functional reliability issue for an optical electrostatic switch. DTIP 2007, Apr 2007, Stresa, lago Maggiore, Italy. pp.246-250. ⟨hal-00257696⟩