Dynamic Modelling of a Nanomanipulator Chain
Résumé
This paper presents a dynamic system modelling approach of ananomanipulator chain developed by the ICA-ACROE and LEPESlaboratories. The chain is a very complex instrument, serving forprecise sensing and manipulation in nanometer scale environment. The objective is to find a suitable model of thechain in view of stability and performances analysis, and forfurther control design of the feedback loops. Such a global modelis here developed using state space representation of thedifferent parts of the chain. Moreover, an experimental modellingand identification of the cantilever parameters are presented. Thenano-scale tip-sample interaction forces are modelled too. Finallythe simulation of the whole nanomanipulation chain is performed,simulating the approach-withdrawal operation which is in goodaccordance with the real patterns of experiments in physics.