Accurate Transient Behavior Measurement of High- Voltage ESD Protections Based on a Very Fast Transmission-Line Pulse System

Antoine Delmas (1) , Nicolas Nolhier (2) , David Trémouilles (2) , Marise Bafleur (2) , Nicolas Mauran (3) , Amaury Gendron (1)

1 Freescale Semiconducteurs
2 LAAS-ISGE - Équipe Intégration de Systèmes de Gestion de l'Énergie
3 LAAS-II

A comprehensive study of the limitations of vf-TLP setup for transient measurements is exposed. A new method, based on a numerical correction of measured data using a commercial Oryx vf-TLP system is presented. It allows the measurement of ESD pulses up to 1000 V with a time resolution down to 60 ps.

Mots clés: ESD; Very fast TLP; transient behavior

Domaines: Micro et nanotechnologies/Microélectronique

Antoine Delmas, Nicolas Nolhier, David Trémouilles, Marise Bafleur, Nicolas Mauran, et al.. Accurate Transient Behavior Measurement of High- Voltage ESD Protections Based on a Very Fast Transmission-Line Pulse System. 31st Electrical Overstress/Electrostatic Discharge Symposium, 2009. EOS/ESD Symposium, Aug 2009, ANAHEIM, United States. pp.165-172. ⟨hal-00445676⟩