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Fabrication and characterization of microlens arrays using a cantilever-based spotter

Abstract : We present a quantitative study on the fabrication of microlenses using a low-cost polymer dispending technique. Our method is based on the use of a silicon micro-cantilever robotized spotter system. We first give a detailed description of the technique. In a second part, the fabricated microlenses are fully characterized by means of SEM (Scanning Electron Microscope), AFM (Atomic Force Microscopy) non contact optical profilometry and Mach-Zehnder interferometry. Diameters in the range [25-130μm] are obtained with an average surface roughness of 2.02nm. Curvature radii, focal lengths as well as aberrations are also measured for the first time: the fabricated microlenses present focal lengths in the range [55-181μm] and exhibit high optical quality only limited by diffraction behaviour with RMS aberration lower than λ/14.
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https://hal.archives-ouvertes.fr/hal-00490862
Contributor : Christophe Levallois <>
Submitted on : Wednesday, June 9, 2010 - 6:24:33 PM
Last modification on : Tuesday, October 6, 2020 - 4:30:48 PM

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Véronique Bardinal, Emmanuelle Daran, Thierry Leichle, Corinne Vergnenegre, Christophe Levallois, et al.. Fabrication and characterization of microlens arrays using a cantilever-based spotter. Optics Express, Optical Society of America - OSA Publishing, 2007, 15 (11), pp.6900-6907. ⟨10.1364/OE.15.006900⟩. ⟨hal-00490862⟩

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