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Self-centered polymer microlenses deposited on SU-8 patterned surfaces by means of a cantilever-based spotter

Abstract : The properties of integrated polymer microlenses fabricated using a cantilever-based deposition tool are investigated for two types of SU-8 micro-patterned surfaces: cylindrical micropillars and large strips. In both cases, we show that a satisfactory self-centering can be obtained in view of an accurate VCSEL beam collimation.
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Conference papers
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https://hal.archives-ouvertes.fr/hal-00490936
Contributor : Christophe Levallois <>
Submitted on : Thursday, June 10, 2010 - 5:41:51 AM
Last modification on : Tuesday, January 12, 2021 - 4:42:09 PM

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  • HAL Id : hal-00490936, version 1

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Véronique Bardinal, Thierry Camps, Christophe Levallois, Thierry Leichle, Benjamin Reig, et al.. Self-centered polymer microlenses deposited on SU-8 patterned surfaces by means of a cantilever-based spotter. European Optical Society Meeting 2008, Sep 2008, Paris, France. p67. ⟨hal-00490936⟩

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