Self-centered polymer microlenses deposited on SU-8 patterned surfaces by means of a cantilever-based spotter

Véronique Bardinal (1) , Thierry Camps (1) , Christophe Levallois (2) , Thierry Leichle (1) , Benjamin Reig (1) , Jean-Baptiste Doucet (1) , Corinne Vergnenegre (1) , Emmanuelle Daran (1)

1 LAAS - Laboratoire d'analyse et d'architecture des systèmes
2 FOTON - Fonctions Optiques pour les Technologies de l'informatiON

The properties of integrated polymer microlenses fabricated using a cantilever-based deposition tool are investigated for two types of SU-8 micro-patterned surfaces: cylindrical micropillars and large strips. In both cases, we show that a satisfactory self-centering can be obtained in view of an accurate VCSEL beam collimation.

Mots clés: microlenses; microstructure; VCSEL; integrated optics; micro-optics; polymers

Domaines: Optique / photonique

Véronique Bardinal, Thierry Camps, Christophe Levallois, Thierry Leichle, Benjamin Reig, et al.. Self-centered polymer microlenses deposited on SU-8 patterned surfaces by means of a cantilever-based spotter. European Optical Society Meeting 2008, Sep 2008, Paris, France. p67. ⟨hal-00490936⟩