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Self-Aligned Polymer Microlenses Fabrication for VCSEL beam shaping

Abstract : We report on the design and fabrication of polymer microlenses fabricated on patterned SU-8 layers in view of integrating microlenses on VCSEL arrays for laser beam shaping. Such an integrated optical system allows for reduction in packaging costs and makes VCSEL integration in microsystems easier. For a standard top-emitting VCSEL, the lens has to be fabricated on a thick intermediate layer (pedestal). The optimal thickness of this pedestal can be modelled as a function of the initial and of the aimed optical properties of the VCSEL beam. In this work, pedestals are fabricated with SU-8, which is a negative-tone photoresist transparent at the lasing wavelength. Lens deposition is realized using a robotized silicon microcantilever spotter technique [1] after a simple SU-8 photolithography step in order to define high aspect ratio cylindrical pedestals with wide range diameters [40-140μm]. The effect of pedestal diameter on the final contact angle and curvature radius has been investigated using non contact optical profilometry and scanning electron microscopy (SEM). We show that this technique leads to a complete delimitation of the polymer droplets and to a better control of the final lens size. Moreover, lens positioning is fully ensured by the self-alignment of the droplet with the pillar center and consequently with the VCSEL source, and allows for meeting the stringent requirement on VCSEL alignment. Corresponding optical properties will be also detailed.
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Contributor : Christophe Levallois <>
Submitted on : Friday, June 11, 2010 - 4:04:44 PM
Last modification on : Friday, January 10, 2020 - 9:08:09 PM


  • HAL Id : hal-00491437, version 1


Christophe Levallois, Thierry Leichle, Véronique Bardinal, Thierry Camps, Jean-Baptiste Doucet, et al.. Self-Aligned Polymer Microlenses Fabrication for VCSEL beam shaping. 2nd European Optical Society Topical Meeting: "OPTICAL MICROSYSTEMS", Sep 2007, Capri, Italy. p1. ⟨hal-00491437⟩



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