Grain morphology of Cu damascene lines
Résumé
The evolution of the grain structure through annealing of narrow damascene Cu interconnects is important for any further design of highly integrated circuits. Here we present a comprehensive transmission electron microscopy study of damascene lines between 80 nm and 3000 nm wide. Experimental results clearly indicate that morphology evolutions through annealing are strongly influenced by the line width. If the lines are wider than 250 nm a strong connection between the grain structure within the lines and the overburden copper is present at least after sufficient annealing. Once the lines are as small as 80 nm the grain structure within the lines are only weakly connected to the overburden copper grown above. (C) 2009 Elsevier B.V. All rights reserved.