Influence of non-ideal clamping in microcantilever resonant frequency estimation

Ludivine Fadel-Taris (1) , Cédric Ayela (1) , Isabelle Dufour (1) , Fabien Josse (2) , Stephen Heinrich (3) , Daisuke Saya (4) , Oliver Brand (5)

1 IMS - Laboratoire de l'intégration, du matériau au système
2 Department of Electrical and Computer Engineering
3 Department of Civil, Construction and Environmental Engineering [Milwaukee]
4 LAAS - Laboratoire d'analyse et d'architecture des systèmes
5 ECE GeorgiaTech - School of Electrical and Computer Engineering - Georgia Insitute of Technology

Domaines: Micro et nanotechnologies/Microélectronique

Ludivine Fadel-Taris, Cédric Ayela, Isabelle Dufour, Fabien Josse, Stephen Heinrich, et al.. Influence of non-ideal clamping in microcantilever resonant frequency estimation. 2011 IEEE International Frequency Control Symposium, 2011, San Francisco, United States. 5 p., ⟨10.1109/FCS.2011.5977310⟩. ⟨hal-00564420⟩