Matlab Code to Link and Pilot Softwares Used for MEMS Simulation

Hikmat Achkar (1) , David Peyrou (1) , Fabienne Pennec (1) , Karim Yacine (1) , André Ferrand (2) , Patrick Pons (1) , Marc Sartor (2) , Robert Plana (1)

1 LAAS - Laboratoire d'analyse et d'architecture des systèmes
2 LGMT - Laboratoire de Génie Mécanique de Toulouse

This paper presents the advances done in the field of simulation and design applied to MEMS. It will be discussed some techniques to link different finite element softwares, especially COMSOL and ANSYS, in order to profit from all the advantages offered by each finite element code. Then, an explication is done on how we piloted ABAQUS using a Matlab routine. In a third and very important section, the use of reverse engineering method is described and applied to RF-MEMS (Radio Frequency-Micro Electro Mechanical System) switches. The applications for each of these methods will be explained.

Domaines: Micro et nanotechnologies/Microélectronique

Hikmat Achkar, David Peyrou, Fabienne Pennec, Karim Yacine, André Ferrand, et al.. Matlab Code to Link and Pilot Softwares Used for MEMS Simulation. Advanced Computational Methods in Engineering 2008, May 2008, Liège, Belgium. 10 p. ⟨hal-00670201⟩