Novel millimeter-wave gas sensor using dielectric resonator with sensitive layer on TiO2

Hamida Hallil (1) , Philippe Menini (1) , Hervé Aubert (2)

1 LAAS - Laboratoire d'analyse et d'architecture des systèmes
2 LAAS-MINC - Équipe MIcro et Nanosystèmes pour les Communications sans fil

A new generation of gas sensors that operates at millimeter-wave frequency range is presented. The sensor uses a dielectric resonator operating with whispering-gallery modes. Here the dielectric resonator is covered by TiO 2 thin film as sensitive layer. A gas or humidity adsorption makes the TiO 2 dielectric permittivity changing and such changing modifies the resonant frequencies of high-Q whispering-gallery modes within the dielectric resonator. From the measurement of these resonant frequencies the humidity concentration can be derived. Here, the proof of concept is demonstrated through full wave electromagnetic simulations. This humidity (gas) sensor can be remotely interrogated and has great potential for wireless sensing network applications.

Mots clés: gas sensors; RF sensor; TiO2; Micro resonator

Domaines: Micro et nanotechnologies/Microélectronique

Hamida Hallil, Philippe Menini, Hervé Aubert. Novel millimeter-wave gas sensor using dielectric resonator with sensitive layer on TiO2. IEEE Sensors 2009, Oct 2009, Christchurch, New Zealand. pp.226 - 228, ⟨10.1109/ICSENS.2009.5398185⟩. ⟨hal-00672681⟩