EFTEM studies on the localization of silicon nanocrystals embedded in SiO2 for nano-devices

Celia Castro (1) , A. Andreozzi (2) , Gérard Benassayag (1) , Anna Maria Beltrán (3) , G. Seguini (2) , Perego M (2) , Sylvie Schamm-Chardon (1)

1 CEMES - Centre d'élaboration de matériaux et d'études structurales
2 IMM-CNR - Laboratorio MDM
3 LAAS - Laboratoire d'analyse et d'architecture des systèmes

we investigated for the first time the capabilities of combining Si NCs fabrication methods like e-beam evaporation and ULE-IBS with block copolymers nanostructured masks.

Domaines: Science des matériaux [cond-mat.mtrl-sci]

Celia Castro, A. Andreozzi, Gérard Benassayag, Anna Maria Beltrán, G. Seguini, et al.. EFTEM studies on the localization of silicon nanocrystals embedded in SiO2 for nano-devices. Proceeding of the 15th European Microscopy Conference, Sep 2012, Manchester, United Kingdom. ⟨hal-00720334⟩