Increasing the Sensitivity and Selectivity of Metal Oxide Gas Sensors by Controlling the Sensitive Layer Polarization

Nicolas Dufour; Yoan Veyrac; Philippe Menini; Frédéric Blanc; Chabane Talhi; Bernard Franc; Christian Ganibal; Corinne Wartelle; Khalifa Aguir

Increasing the Sensitivity and Selectivity of Metal Oxide Gas Sensors by Controlling the Sensitive Layer Polarization

Nicolas Dufour ¹ Yoan Veyrac ² Philippe Menini ¹ Frédéric Blanc ² Chabane Talhi ² Bernard Franc ² Christian Ganibal ³ Corinne Wartelle ⁴ Khalifa Aguir ⁵

1 LAAS-MICA - Équipe MICrosystèmes d'Analyse

LAAS - Laboratoire d'analyse et d'architecture des systèmes

2 LAAS - Laboratoire d'analyse et d'architecture des systèmes

3 LAAS-II

LAAS - Laboratoire d'analyse et d'architecture des systèmes

4 UPCG - UMR_S 640/UMR 8151 - Unité de Pharmacologie Chimique et Génétique

5 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

Abstract : The effects of bias current on sensitivity and selectivity of resistive Metal-Oxide (MOX) sensors toward gases have been investigated. While the working temperature is kept constant, it has been found that tuning the polarization of the MOX thin film induces changes on its sensitivity toward gases. Besides, the behavior of sensitivity versus bias current depends on the nature of the gas and of the thin sensing film, meaning it is possible to enhance the selectivity by adjusting the polarization of different sensitive layers. This underutilized parameter provides a new way of improving easily gas sensors sensitivity and above all selectivity. It would then be interesting to polarize individually each sensor of a multi-sensor device in order to optimize the whole system performances, which may represent a breakthrough in the development of smart E-Nose.

Document type :

Conference papers

Domain :

Engineering Sciences [physics] / Electronics

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Submitted on : Friday, September 14, 2012 - 11:55:49 AM
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