Elaboration and characterization of Fe1-xO thin films sputter deposited from magnetite target

Bruno Mauvernay (1) , Lionel Presmanes (1) , Stéphanie Capdeville (1) , Valdirene Gonzaga de Resende (2) , Eddy de Grave (2) , Corine Bonningue (1) , Philippe Tailhades (1)

1 CIRIMAT - Centre interuniversitaire de recherche et d'ingenierie des matériaux
2 Université de Gand, Laboratoire de Nutrition Animale et de Qualité des Produits Animaux

Majority of the authors report elaboration of iron oxide thin films by reactive magnetron sputtering from an iron target with Ar-O2 gas mixture. Instead of using the reactive sputtering of a metallic target we report here the preparation of Fe1-xOthin films, directly sputtered froma magnetite target in a pure argon gas flow with a bias power applied. This oxide is generally obtained at very low partial oxygen pressure and high temperature.We showed that bias sputtering which can be controlled very easily can lead to reducing conditions during deposition of oxide thin film on simple glass substrates. The proportion of wustite was directly adjusted bymodifying the power of the substrate polarization. Atomic force microscopy was used to observe these nanostructured layers. Mössbauer measurements and electrical properties versus bias polarization and annealing temperature are also reported.

Mots clés: Iron oxide; Sputtering; Electrical properties and measurements; Mössbauer spectroscopy

Domaines: Matériaux

Bruno Mauvernay, Lionel Presmanes, Stéphanie Capdeville, Valdirene Gonzaga de Resende, Eddy de Grave, et al.. Elaboration and characterization of Fe1-xO thin films sputter deposited from magnetite target. Thin Solid Films, 2007, vol. 515, pp. 6532-6536. ⟨10.1016/j.tsf.2006.11.131⟩. ⟨hal-00806076⟩