Identification of dynamic nonlinear thermal transfers for precise correction of bias induced by temperature variations

Céline Casenave (1) , Gérard Montseny (1) , Henri Camon (2) , François Blard (2)

1 LAAS-MRS
2 LAAS-N2IS - Équipe Nano Ingénierie et Intégration des Systèmes

We present a general method for dynamic correction of biases induced by temperature variations. This method is simple to implement and useful when very high precision is required: it indeed allows significant improvements compared to standard static corrections. It is mainly based on a universal dynamic model allowing to describe macroscopic effects of complex underlying thermal phenomena inside the device. Some experimental results related to a MEMS with high precision pull-in voltage are presented in order to highlight the efficiency of the approach.

Domaines: Automatique

Céline Casenave, Gérard Montseny, Henri Camon, François Blard. Identification of dynamic nonlinear thermal transfers for precise correction of bias induced by temperature variations. Microsystem Technologies, 2011, 17 (4), pp.645--654. ⟨10.1007/s00542-011-1227-9⟩. ⟨hal-00833059⟩