Identification of dynamic nonlinear thermal transfers for precise correction of bias induced by temperature variations
Résumé
We present a general method for dynamic correction of biases induced by temperature variations. This method is simple to implement and useful when very high precision is required: it indeed allows significant improvements compared to standard static corrections. It is mainly based on a universal dynamic model allowing to describe macroscopic effects of complex underlying thermal phenomena inside the device. Some experimental results related to a MEMS with high precision pull-in voltage are presented in order to highlight the efficiency of the approach.
Domaines
Automatique
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MicrosystemTechnologies2010_CasenaveMontsenyCamonBlard.pdf (5.32 Mo)
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