Fabrication and characterization of a fully integrated biosensor associating microfluidic device and RF circuit

Stéphane Pinon (1) , Daouda Lamine Diedhiou (2) , Ali Boukabache (1) , Véronique Conédéra (3) , David Bourrier (3) , Anne Marie Gué (1) , Gaëtan Prigent (4) , Eric Rius (2) , Cédric Quendo (2) , Benjamin Potelon (2) , Jean-François Favennec (5)

1 LAAS-N2IS - Équipe Nano Ingénierie et Intégration des Systèmes
2 Lab-STICC_UBO_MOM_DIM
3 LAAS-TEAM - Service Techniques et Équipements Appliqués à la Microélectronique
4 ENSEEIHT - Ecole Nationale Supérieure d'Electrotechnique, d'Electronique, d'Informatique, d'Hydraulique et de Télécommunications
5 Lab-STICC_ENIB_MOM_DIM

This paper presents the first results of the fabrication and characterization of a biological sensor based on two complementary parts. A microfluidic channel along with a micromachined stop-band filter are used to detect the type of fluid which flows beneath the electronic circuit. The tridimensional (3D) structure of the microstrip technology is integrated using SU8 material which thus supports the use of buried channels. Besides being a method without contact, this bio-sensor avoids evaporation, contamination, or label fixation. Changes to the cutoff frequency and attenuation allow us to differentiate three values of the salt in water concentration with a maximum variation of attenuation of 6.5%.

Mots clés: Resonator; filter; sensor; microfluidic; SU8; microwave

Domaines: Micro et nanotechnologies/Microélectronique; Electronique; Electromagnétisme

Stéphane Pinon, Daouda Lamine Diedhiou, Ali Boukabache, Véronique Conédéra, David Bourrier, et al.. Fabrication and characterization of a fully integrated biosensor associating microfluidic device and RF circuit. IMS 2012 - Microwave Symposium Digest (MTT), 2012 IEEE MTT-S, Jun 2012, Montréal, Canada. pp.THPN-1 1330. ⟨hal-00856168⟩