A New Junction Termination Using a Deep Trench Filled With BenzoCycloButene

Loïc Théolier (1) , Hicham Mahfoz-Kotb (1) , Karine Isoird (1) , Frédéric Morancho (1) , Sandrine Assié-Souleille (2) , Nicolas Mauran (2)

1 LAAS-ISGE - Équipe Intégration de Systèmes de Gestion de l'Énergie
2 LAAS-I2C - Service Instrumentation Conception Caractérisation

A new junction termination for high-voltage devices using a deep trench filled with dielectric, which dramatically decreases the junction-termination area, is proposed and fabricated. The termination breakdown voltage dependence on the dielectric critical electric field and its permittivity is theoretically studied. Finally, the proposed junction termination is experimentally validated using BenzoCycloButene (BCB) as dielectric material. Experimental results show that the proposed termination sustains more than 1200 V with a 70 µm width and 100 µm depth trench filled by BCB.

Domaines: Energie électrique

Loïc Théolier, Hicham Mahfoz-Kotb, Karine Isoird, Frédéric Morancho, Sandrine Assié-Souleille, et al.. A New Junction Termination Using a Deep Trench Filled With BenzoCycloButene. IEEE Electron Device Letters, 2009, 30 (6), pp.687 - 689. ⟨10.1109/LED.2009.2020348⟩. ⟨hal-00991660⟩