Nicolas Dufour, Audrey Chapelle, Fabien Mesnilgrente, Véronique Conédéra, Philippe Menini. Technological improvements of a metal oxide gas multi-sensor based on a micro-hotplate structure and inkjet deposition for an automotive air quality sensor application.
25th Micromechanics and Microsystems Europe workshop (MME 2014), Aug 2014, Istanbul, Turkey. 4p.
⟨hal-01058911⟩