Technological improvements of a metal oxide gas multi-sensor based on a micro-hotplate structure and inkjet deposition for an automotive air quality sensor application

Nicolas Dufour 1 Audrey Chapelle 1 Fabien Mesnilgrente 2 Véronique Conédéra 2 Philippe Menini 1
1 LAAS-MICA - Équipe MICrosystèmes d'Analyse
LAAS - Laboratoire d'analyse et d'architecture des systèmes
2 LAAS-TEAM - Service Techniques et Équipements Appliqués à la Microélectronique
LAAS - Laboratoire d'analyse et d'architecture des systèmes
Abstract : In this paper we present a gas multi-sensor composed by an optimized low consumption (55mW-500°C) and low cost (microelectronics process) micro-hotplate and by three different metal oxides (CuO, ZnO and SnO2) sensing materials deposited by inkjet directly on the membrane. The realized structures have shown a stable and reproducible behavior. By using a specific temperature-modulated profile associated to a multivariate classifier, we have realized an electronic nose able to detect selectively four gases (alone and mixed) at low concentrations (CO-100ppm, NO2-0.2ppm, NH3-5ppm and C2H4O-2ppm).
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Nicolas Dufour, Audrey Chapelle, Fabien Mesnilgrente, Véronique Conédéra, Philippe Menini. Technological improvements of a metal oxide gas multi-sensor based on a micro-hotplate structure and inkjet deposition for an automotive air quality sensor application. 25th Micromechanics and Microsystems Europe workshop (MME 2014), Aug 2014, Istanbul, Turkey. 4p. ⟨hal-01058911⟩

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