Parameter-tolerant design of high contrast gratings

Christyves Chevallier (1) , Nicolas Fressengeas (1) , Joel Jacquet (2) , Guilhem Almuneau (3) , Youness Laaroussi (3) , Olivier Gauthier-Lafaye (3) , Laurent Cerutti (4, 5) , Frédéric Genty (1)

1 LMOPS - Laboratoire Matériaux Optiques, Photonique et Systèmes
2 Chercheur indépendant
3 LAAS-PHOTO - Équipe Photonique
4 IES - Institut d’Electronique et des Systèmes
5 NANOMIR - Composants à Nanostructure pour le moyen infrarouge

This work is devoted to the design of high contrast grating mirrors taking into account the technological constraints and tolerance of fabrication. First, a global optimization algorithm has been combined to a numerical analysis of grating structures (RCWA) to automatically design HCG mirrors. Then, the tolerances of the grating dimensions have been precisely studied to develop a robust optimization algorithm with which high contrast gratings, exhibiting not only a high efficiency but also large tolerance values, could be designed. Finally, several structures integrating previously designed HCGs has been simulated to validate and illustrate the interest of such gratings.

Mots clés: High contrast grating; Near wavelength diffraction grating; Grating mirror; Robust optimization; Tolerance analysis

Domaines: Optique [physics.optics]; Science des matériaux [cond-mat.mtrl-sci]

Christyves Chevallier, Nicolas Fressengeas, Joel Jacquet, Guilhem Almuneau, Youness Laaroussi, et al.. Parameter-tolerant design of high contrast gratings. Photonics West, SPIE, Feb 2015, San Francisco, United States. pp.93720N-93720N-8, ⟨10.1117/12.2081595⟩. ⟨hal-01132683⟩