K. Iga, Vertical-Cavity Surface-Emitting Laser: Its Conception and Evolution, Japanese Journal of Applied Physics, vol.47, issue.1, pp.1-10, 2008.
DOI : 10.1143/JJAP.47.1

A. Larsson, Advances in VCSELs for Communication and Sensing Selected Topics in Quantum Electronics, IEEE Journal, vol.17, issue.6, p.1552, 1567.

R. Michalzik, VCSELs: A Research Review " in Fundamentals, Technology and Applications of Vertical-Cavity Surface-Emitting Lasers, pp.1-17, 2013.
DOI : 10.1007/978-3-642-24986-0

E. Thrush, O. Levi, W. Ha, G. Carey, L. J. Cook et al., Integrated semiconductor vertical-cavity surface-emitting lasers and PIN photodetectors for biomedical fluorescence sensing, IEEE Journal of Quantum Electronics, vol.40, issue.5, pp.491-498, 2004.
DOI : 10.1109/JQE.2004.826440

J. Perchoux and T. Bosch, Multimode VCSELs for Self-Mixing Velocity Measurements, 2007 IEEE Sensors, pp.419-422, 2007.
DOI : 10.1109/ICSENS.2007.4388425

A. Kroner, I. Kardosh, F. Rinaldi, and R. Michalzik, Towards VCSEL-based integrated optical traps for biomedical applications, Electronics Letters, vol.42, issue.2, pp.93-94, 2006.
DOI : 10.1049/el:20063821

V. Fontaine, A. Díaz, and . Bernad, A Highly sensitive Microsystem Based on nanomechanical biosensors for genomics applications, Sensors and Actuators B, vol.118, pp.1-22, 2006.

D. Heinis, C. Gorecki, C. Bringer, V. Bardinal, T. Camps et al., Miniaturized Scanning Near-Field Microscope Sensor Based on Optical Feedback Inside a Single-Mode Oxide-Confined Vertical-Cavity Surface-Emitting Laser, Japanese Journal of Applied Physics, vol.42, issue.Part 2, No. 12A, pp.1469-1471, 2003.
DOI : 10.1143/JJAP.42.L1469
URL : https://hal.archives-ouvertes.fr/hal-00094078

F. Koyama, S. Kinoshita, and K. Iga, Room???temperature continuous wave lasing characteristics of a GaAs vertical cavity surface???emitting laser, Applied Physics Letters, vol.55, issue.3, pp.221-222, 1989.
DOI : 10.1063/1.101913

J. L. Jewell, Y. H. Lee, S. Walker, A. Scherer, J. P. Harbison et al., Low-threshold electrically pumped vertical-cavity surface-emitting microlasers, Electronics Letters, vol.25, issue.17, pp.25-1123, 1989.
DOI : 10.1049/el:19890754

D. L. Huffaker, D. G. Deppe, K. Kumar, R. , and T. J. , Native???oxide defined ring contact for low threshold vertical???cavity lasers, Applied Physics Letters, vol.65, issue.1, pp.97-99, 1994.
DOI : 10.1063/1.113087

M. Ortsiefer, W. Hofmann, E. Rönneberg, A. Boletti, A. Gatto et al., High speed 1.3 µm VCSELs for 12.5 Gbit/s optical interconnects, Electronics Letters, issue.16, pp.44-974, 2008.

A. J. Danner, T. S. Kim, and K. D. Choquette, Single fundamental mode photonic crystal vertical cavity laser with improved output power, Electronics Letters, vol.41, issue.6, pp.41-325, 2005.
DOI : 10.1049/el:20057841

M. C. Huang, Y. Zhou, and C. J. Chang-hasnain, Single mode highcontrast subwavelength grating vertical cavity surface emitting lasers, Appl. Phys. Lett, vol.92, pp.10-1063, 2008.

C. J. Chang-hasnain, Tunable VCSEL, IEEE Journal of Selected Topics in Quantum Electronics, vol.6, issue.6, pp.978-987, 2000.
DOI : 10.1109/2944.902146

M. S. Wu, E. C. Vail, G. S. Li, W. Yuen, and C. J. Chang-hasnain, Widely and continuously tunable micromachined resonant cavity detector with wavelength tracking, IEEE Photonics Technology Letters, vol.8, issue.1, pp.98-100, 1996.
DOI : 10.1109/68.475791

M. Nakahama, H. Sano, S. Inoue, T. Sakaguchi, A. Matsutani et al., Tuning Characteristics of Monolithic MEMS VCSELs With Oxide Anti-Reflection Layer, IEEE Photonics Technology Letters, vol.25, issue.18, p.17471750, 2013.
DOI : 10.1109/LPT.2013.2272732

M. Maute, F. Riemenschneider, G. Bohm, H. Halbritter, M. Ortsiefer et al., Micro-mechanically tunable long wavelength VCSEL with buried tunnel junction, Electronics Letters, vol.40, issue.7, p.407, 2004.
DOI : 10.1049/el:20040297

B. Kögel, A. Abbaszadehbanaeiyan, P. Westbergh, A. Haglund, J. Gustavsson et al., Integrated tunable VCSELs with simple MEMS technology, 22nd IEEE International Semiconductor Laser Conference, pp.22-23, 2010.
DOI : 10.1109/ISLC.2010.5642636

C. Gierl, T. Gruendl, P. Debernardi, K. Zogal, C. Grasse et al., Surface micromachined tunable 155 ??m-VCSEL with 102 nm continuous single-mode tuning, Optics Express, vol.19, issue.18, pp.17336-17343, 2011.
DOI : 10.1364/OE.19.017336

V. Jayaraman, G. D. Cole, M. Robertson, C. Burgner, D. John et al., Rapidly swept, ultra-widely-tunable 1060???nm MEMS-VCSELs, Electronics Letters, vol.48, issue.21, pp.48-1331, 2012.
DOI : 10.1049/el.2012.3180

V. Bardinal, T. Camps, B. Reig, D. Barat, E. Daran et al., Collective Micro-Optics Technologies for VCSEL Photonic Integration, Advances in Optical Technologies, vol.23, issue.3, 2011.
DOI : 10.1038/nphoton.2010.143

L. Fan, M. C. Wu, H. C. Lee, and P. Grodzinski, Dynamic beam switching of vertical-cavity surface-emitting lasers with integrated optical beam routers, IEEE Photonics Technology Letters, vol.9, issue.4, 1997.
DOI : 10.1109/68.559403

M. C. Wu, L. Lin, S. Lee, and K. S. Pister, Micromachined freespace integrated micro-optics " Sensors and Actuators A: Physical, pp.1-2, 1995.

A. Tuantranont, V. M. Bright, J. Zhang, W. Zhang, J. A. Neff et al., Optical beam steering using MEMS-controllable microlens array " Sensors and Actuators A: Physical, 2001.

K. Ishikawa, J. Zhang, A. Tuantranont, V. M. Bright, and Y. Lee, An integrated micro-optical system for VCSEL-to-fiber active alignment " Sensors and actuators A 103, pp.109-115, 2003.

K. W. Jo, M. S. Kim, J. H. Lee, E. K. Kim, and K. Park, Optical Characteristics of a Self-Aligned Microlens Fabricated on the Sidewall of a 45>tex<$^circ$>/tex<-Angled Optical Fiber, IEEE Photonics Technology Letters, vol.16, issue.1, pp.138-140, 2004.
DOI : 10.1109/LPT.2003.820485

K. Hedsten, J. Melin, J. Bengtsson, P. Modh, D. Karlén et al., MEMS-based VCSEL beam steering using replicated polymer diffractive lens, Sensors and Actuators A: Physical, vol.142, issue.1, pp.336-345, 2008.
DOI : 10.1016/j.sna.2006.12.015

N. Quack, J. B. Chou, and M. C. Wu, Self-aligned VCSEL-microlens scanner with large scan range, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS), pp.656-659, 2012.
DOI : 10.1109/MEMSYS.2012.6170272

B. Reig, . Camps, . Bardinal, . Bourrier, J. Daran et al., Fabrication of polymer-based optical microsystem arrays suited for the active focusing of vertical laser diodes, Journal of Micromechanics and Microengineering, vol.22, issue.6, p.65006, 2012.
DOI : 10.1088/0960-1317/22/6/065006

B. Reig, V. Bardinal, T. Camps, J. Doucet, and E. Daran, A miniaturized VCSEL-based system for optical sensing in a microfluidic channel, 2012 IEEE Sensors, pp.28-31, 2012.
DOI : 10.1109/ICSENS.2012.6411593

H. Lorenz, M. Despont, N. Fahrni, J. Brugger, P. Vettiger et al., High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS, Sensors and Actuators A: Physical, vol.64, issue.1, pp.33-39, 1998.
DOI : 10.1016/S0924-4247(98)80055-1

R. Feng and R. J. Farris, The characterization of thermal and elastic constants for an epoxy photoresist SU-8 coating, Journal of Materials Science, vol.37, issue.22, pp.4793-4799, 2002.
DOI : 10.1023/A:1020862129948

T. Namazu, S. Inoue, K. Takio, T. Fujita, K. Maenaka et al., Visco-elastic properties of micron-thick su-8 polymers measured by two different types of uniaxial tensile tests i i i, 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005., pp.447-450, 2005.
DOI : 10.1109/MEMSYS.2005.1453963

T. Fujita, K. Maenaka, and Y. Takayama, Dual-axis MEMS mirror for large deflection-angle using SU-8 soft torsion beam. Sensors and Actuators A: Physical, pp.16-21, 2005.

L. Wang, D. M. Sipe, Y. Xu, L. , Q. Seidemann et al., A MEMS thermal biosensor for metabolic monitoring applications " . Microelectromechanical Systems Fabrication and investigation of in-plane compliant SU8 structures for MEMS and their application to micro valves and micro grippers, Sensors and Actuators A: Physical, pp.318-327, 2002.

S. B. Park, S. Chung, S. Makhar, H. Ackler, L. et al., Structural reliability of SU-8 material for MEMS application American Society of Mechanical Engineers, ASME 2005 International Mechanical Engineering Congress and Exposition, pp.251-258, 2005.

B. Reig, V. Bardinal, J. Doucet, E. Daran, T. Camps et al., Study of SU-8 reliability in wet thermal ambient for application to polymer micro-optics on VCSELs, Japanese Journal of Applied Physics, vol.53, issue.8S2, pp.8-11, 2014.
DOI : 10.7567/JJAP.53.08MC03
URL : https://hal.archives-ouvertes.fr/hal-01103136

B. Bêche, . Pelletier, J. Gaviot, and . Zyss, Single-mode TE00???TM00 optical waveguides on SU-8 polymer, Optics Communications, vol.230, issue.1-3, pp.1-3, 2004.
DOI : 10.1016/j.optcom.2003.11.016

B. Beche, Integrated photonics devices on Su8 organic materials, Int. J. of Phys. Sc, vol.5, pp.612-618, 2010.
URL : https://hal.archives-ouvertes.fr/hal-00915628

J. Hsieh, C. J. Weng, H. L. Yin, H. H. Lin, and H. Chou, Realization and characterization of SU-8 micro cylindrical lenses for in-plane micro optical systems, Microsystem technologies, pp.11-429, 2005.
DOI : 10.1007/s00542-004-0463-7

D. J. Hayes, M. E. Grove, D. B. Wallace, T. Chen, and W. R. Cox, Inkjet printing in the manufacture of electronics, photonics, and displays, Nanoscale Optics and Applications, pp.94-99, 2002.
DOI : 10.1117/12.451029

A. Nallani, T. Chen, J. Lee, D. Hayes, and D. Wallace, Wafer level optoelectronic device packaging using MEMS, Proc. SPIE 5836, 2005.

V. Bardinal, B. Reig, T. Camps, C. Levallois, E. Daran et al., Spotted Custom Lenses to Tailor the Divergence of Vertical-Cavity Surface-Emitting Lasers IEEE Photon, Technol. Lett, vol.22, pp.211592-1594, 2010.

B. Reig, V. Bardinal, T. Camps, Y. G. Boucher, C. Levallois et al., Polymer tunable microlens arrays suitable for VCSEL beam control, Micro-Optics 2012, 2012.
DOI : 10.1117/12.922616
URL : https://hal.archives-ouvertes.fr/hal-00725891

L. Campagnolo, M. Nikoli?, J. Perchoux, Y. L. Lim, K. Bertling et al., Flow profile measurement in microchannel using the optical feedback interferometry sensing technique, Microfluidics and Nanofluidics, pp.1-7, 2012.
DOI : 10.1007/s10404-012-1029-0
URL : https://hal.archives-ouvertes.fr/hal-00757538

F. Ceyssens and R. Puers, Creating multi-layered structures with freestanding parts in SU-8, Journal of Micromechanics and Microengineering, vol.16, issue.6, pp.19-23, 2006.
DOI : 10.1088/0960-1317/16/6/S04

P. Abgrall, C. Lattes, V. Conédéra, X. Dollat, S. Colin et al., A novel fabrication method of flexible and monolithic 3D microfluidic structures using lamination of SU-8 films, Journal of Micromechanics and Microengineering, vol.16, issue.1, pp.113-134, 2006.
DOI : 10.1088/0960-1317/16/1/016

S. Abada, ;. Daran, ;. T. Doucet, ;. Camps, and . Bardinal, Uniform fabrication of thick SU-8 patterns on small-sized wafers for micro-optics applications, Proc. SPIE 9130, 2014.

C. Levallois, V. Bardinal, T. Camps, T. Leïchlé, E. Daran et al., VCSEL collimation using self-aligned integrated polymer microlenses, Micro-Optics 2008, 2008.
DOI : 10.1117/12.780545
URL : https://hal.archives-ouvertes.fr/hal-00489082

V. Bardinal, E. Daran, T. Leïchlé, C. Vergnenègre, C. Levallois et al., Fabrication and characterization of microlens arrays using a cantilever-based spotter, Optics Express, vol.15, issue.11, pp.6900-6907, 2007.
DOI : 10.1364/OE.15.006900
URL : https://hal.archives-ouvertes.fr/hal-00490862

J. Y. Kim, C. Martin-olmos, N. S. Baek, and J. Brugger, Simple and easily controllable parabolic-shaped microlenses printed on polymeric mesas, Journal of Materials Chemistry C, vol.97, issue.11, pp.2152-2157, 2013.
DOI : 10.1039/c3tc00632h

S. Abada-;-t, ;. Camps, . Reig, ;. E. Doucet, . Daran-;-v et al., 3D optimization of a polymer MOEMS for active focusing of VCSEL beam, Proc. SPIE 9130, 2014.

A. Wang, W. Chang, . Murarka, J. H. Lang, and V. Bulovic, Transferprinted composite membranes for electrically-tunable organic optical microcavities, Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on, pp.1217-1243, 2014.