Functionalization of, and Deposition on Complex-Shaped Surfaces: Vacuum Processes, Materials, Models, Challenges, and Methods

Anne-Lise Thomann (1) , Constantin Vahlas (2)

1 GREMI - Groupe de recherches sur l'énergétique des milieux ionisés
2 CIRIMAT - Centre interuniversitaire de recherche et d'ingenierie des matériaux

Mots clés: Physical vapor deposition; chemical vapor deposition; aluminum thin film; complex-shaped substrate

Domaines: Matériaux

Anne-Lise Thomann, Constantin Vahlas. Functionalization of, and Deposition on Complex-Shaped Surfaces: Vacuum Processes, Materials, Models, Challenges, and Methods. Chemical Vapor Deposition, 2011, ⟨10.1002/cvde.201100101⟩. ⟨hal-01288652⟩