Novel SAW gas sensor based on graphene

Ioannis Nikolaou (1) , Hamida Hallil (1) , Georges Deligeorgis (2) , Véronique Conédéra (3) , Hermenegildo Garcia (4) , Corinne Dejous (1) , Dominique Rebière (1)

1 IMS - Laboratoire de l'intégration, du matériau au système
2 FORTH - Foundation for Research and Technology - Hellas
3 LAAS-TEAM - Service Techniques et Équipements Appliqués à la Microélectronique
4 UPV - Universitat Politècnica de València = Universitad Politecnica de Valencia = Polytechnic University of Valencia

This work presents ultrasensitive Surface Acoustic Wave (SAW) devices based on graphene. Since, a great deal of research work has been invested in this field, graphene innovative solutions have been prepared in order to explore gas - moisture sensing applications. The real time detection measurement of the coated sensor under C2H6O and Relative Humidity (RH) is presented. The adsorption of vapor compounds leads to a frequency shift of several kHz, at low exposures of the target analytes, respectively. The experiments have realized at room temperature and rapid response and short recovery time were observed.

Domaines: Micro et nanotechnologies/Microélectronique

Ioannis Nikolaou, Hamida Hallil, Georges Deligeorgis, Véronique Conédéra, Hermenegildo Garcia, et al.. Novel SAW gas sensor based on graphene. Microelectronics Technology and Devices (SBMicro), Aug 2015, Salvador, Brazil. ⟨10.1109/SBMicro.2015.7298140⟩. ⟨hal-01308540⟩