Plasma etching of thick Parylene C for fabrication of biocompatible electrodes

Aurélie Lecestre 1, 2 Aziliz Lecomte 3 David Bourrier 1 Pascal Dubreuil 3 Emeline Descamps 4 Christian Bergaud 3
1 LAAS-TEAM - Service Techniques et Équipements Appliqués à la Microélectronique
LAAS - Laboratoire d'analyse et d'architecture des systèmes
3 LAAS-NBS - Équipe NanoBioSystèmes
LAAS - Laboratoire d'analyse et d'architecture des systèmes
4 LAAS-MICA - Équipe MICrosystèmes d'Analyse
LAAS - Laboratoire d'analyse et d'architecture des systèmes
Abstract : Here we report on the plasma etching of thick parylene C in order to define flexible implantable probes for neural applications. To reduce the foreign body response and to ensure a good stability for chronic in vivo recordings, the chosen substrate for the neural probes is Parylene C, a polymer known for its high biocompatibility, flexibility and chemical inertness. In the manufacturing process, highly defined structuration steps of Parylene C are essential. Techniques based on laser, scalpel and wet etching have shown to be unsuitable for properly cut structures, i.e. with good dimensions control and without residues. As an alternative, plasma etching has shown great promise in this area. However, because of the highly crystalline structure of this polymer, fast etching rate, lack of residues and high aspect ratios remain hard to achieve, especially for deep etching of thick layers.
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Aurélie Lecestre, Aziliz Lecomte, David Bourrier, Pascal Dubreuil, Emeline Descamps, et al.. Plasma etching of thick Parylene C for fabrication of biocompatible electrodes . 9th Workshop on Plasma Etch and Strip in Microtechnology (PESM2016), May 2016, Grenoble, France. ⟨hal-01326492⟩

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