Parylene-based flexible neural probes with PEDOT coated surface for brain stimulation and recording, Biosensors and Bioelectronics, vol.67, pp.450-457, 2015. ,
DOI : 10.1016/j.bios.2014.09.004
Parylene etching techniques for microfluidics and biomems, 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005., pp.568-571, 2005. ,
DOI : 10.1109/MEMSYS.2005.1453993
Plasma removal of Parylene C, Journal of Micromechanics and Microengineering, vol.18, issue.4, p.13, 2008. ,
DOI : 10.1088/0960-1317/18/4/045004
A reusable high aspect ratio parylene-C shadow mask technology for micropatterning applications " Sensors and Actuator A, pp.145-146, 2007. ,
Comparaison of the new thick negative resist to SU8 resist, SPIE Proceeding, p.7972, 2011. ,