V. Castagnola, E. Descamps, A. Lecestre, L. Dahan, J. Remaud et al., Parylene-based flexible neural probes with PEDOT coated surface for brain stimulation and recording, Biosensors and Bioelectronics, vol.67, pp.450-457, 2015.
DOI : 10.1016/j.bios.2014.09.004

E. Meng and Y. Tai, Parylene etching techniques for microfluidics and biomems, 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005., pp.568-571, 2005.
DOI : 10.1109/MEMSYS.2005.1453993

E. Meng, P. Li, and Y. C. Tai, Plasma removal of Parylene C, Journal of Micromechanics and Microengineering, vol.18, issue.4, p.13, 2008.
DOI : 10.1088/0960-1317/18/4/045004

S. Selvarasah, S. H. Chao, C. L. Chen, S. Sridhar, A. Busnaina et al., A reusable high aspect ratio parylene-C shadow mask technology for micropatterning applications " Sensors and Actuator A, pp.145-146, 2007.

D. Bourrier, M. Dilhan, A. Ghannan, and H. Granier, Comparaison of the new thick negative resist to SU8 resist, SPIE Proceeding, p.7972, 2011.