Inkjet – printed graphene oxide thin layers on Love wave devices for humidity and vapor Detection

Ioannis Nikolaou (1) , Hamida Hallil (1) , Véronique Conédéra (2) , Georges Deligeorgis (3) , Corinne Dejous (1) , Dominique Rebière (1)

1 IMS - Laboratoire de l'intégration, du matériau au système
2 LAAS-TEAM - Service Techniques et Équipements Appliqués à la Microélectronique
3 FORTH - Foundation for Research and Technology - Hellas

We report inkjet printing as an alternative deposition method for low-cost gas or humidity sensors based on graphene oxide (GO)-coated Love wave devices. Our inkjet printing method paves the way toward massive, large-area industrial production of multi-layered GO chemical sensing films for volatile organic compounds and relative humidity (RH) detection applications. The adsorption of vapor compounds on GO led to the sensitivities of 30 Hz/ppm, 24 Hz/ppm, and 2.4 kHz/1% of ethanol (C2H6O), toluene (C7H8), and RH, respectively. Electrical, gaseous, and RH characterization analyses showed that this GO-based inkjet printing method is one of the most promising features for inexpensive and high-speed patterning devices for high demanding gas trace or RH sensing applications.

Mots clés: Graphene; Ethanol; Surface acoustic waves; Sensor phenomena and characterization; Surface treatment

Domaines: Micro et nanotechnologies/Microélectronique

Ioannis Nikolaou, Hamida Hallil, Véronique Conédéra, Georges Deligeorgis, Corinne Dejous, et al.. Inkjet – printed graphene oxide thin layers on Love wave devices for humidity and vapor Detection. IEEE Sensors Journal, 2016, 16 (21), pp.7620 - 7627. ⟨10.1109/JSEN.2016.2600269⟩. ⟨hal-01393038⟩