Integration of tungsten layers for the mass fabrication of WO3-based pH-sensitive potentiometric microsensors

Ahmet Lale 1 Aliki Tsopela 1 Aurélie Civélas 1 Ludovic Salvagnac 2 Jérôme Launay 1 Pierre Temple-Boyer 1
1 LAAS-MICA - Équipe MICrosystèmes d'Analyse
LAAS - Laboratoire d'analyse et d'architecture des systèmes
2 LAAS-TEAM - Service Techniques et Équipements Appliqués à la Microélectronique
LAAS - Laboratoire d'analyse et d'architecture des systèmes
Abstract : (W/WO3 –Ag/AgCl) and (Pt/IrO2 – Ag/AgCl) potentiometric microdevices were developed for pH measurement in liquid phase using a (Pt – Pt – Ag/AgCl) electrochemical microcells (ElecCell) silicon-based technological platform. A special emphasis was placed on the mass fabrication of the W/WO3 microelectrode using sputtering deposition and oxygen plasma processes. Compared to the Pt/IrO2-based one, the W/WO3-based microelectrodes showed lower performances regarding the pH measurement. Nevertheless, since W/WO3 microelectrodes yielded quasi-Nernstian sensitivity (around 55 mV/pH) in the [2-12] pH range, tungsten oxide WO3 can be considered as a good candidate for the mass fabrication of pH microsensors using silicon technologies, even if important temporal drift (at least 6 millivolts per hour) and high hysteresis (around 50 mV) were also evidenced.
Keywords : tungsten oxide WO3 thin films tungsten W physical vapour deposition PVD potentiometric microdevices microelectrodes pH measurement iridium oxide IrO2
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LAAS | CNRS | LAAS-MICRO-NANO-BIO-TECHNOLOGIES | LAAS-MICA | INSA-TOULOUSE | INSA-GROUPE | UNIV-TLSE3 | LAAS-TEAM | UT1-CAPITOLE | UNIV-TLSE2

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Ahmet Lale, Aliki Tsopela, Aurélie Civélas, Ludovic Salvagnac, Jérôme Launay, et al.. Integration of tungsten layers for the mass fabrication of WO3-based pH-sensitive potentiometric microsensors. Sensors and Actuators B: Chemical, Elsevier, 2015, Sensors and Actuators B, 206, pp.152 - 158. ⟨10.1016/j.snb.2014.09.054⟩. ⟨hal-01399777⟩

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