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Journal articles
Integration of tungsten layers for the mass fabrication of WO3-based pH-sensitive potentiometric microsensors
Abstract : (W/WO3 –Ag/AgCl) and (Pt/IrO2 – Ag/AgCl) potentiometric microdevices were developed for pH measurement in liquid phase using a (Pt – Pt – Ag/AgCl) electrochemical microcells (ElecCell) silicon-based technological platform. A special emphasis was placed on the mass fabrication of the W/WO3 microelectrode using sputtering deposition and oxygen plasma processes. Compared to the Pt/IrO2-based one, the W/WO3-based microelectrodes showed lower performances regarding the pH measurement. Nevertheless, since W/WO3 microelectrodes yielded quasi-Nernstian sensitivity (around 55 mV/pH) in the [2-12] pH range, tungsten oxide WO3 can be considered as a good candidate for the mass fabrication of pH microsensors using silicon technologies, even if important temporal drift (at least 6 millivolts per hour) and high hysteresis (around 50 mV) were also evidenced.
Cited literature [60 references]
https://hal.laas.fr/hal-01399777
Contributor : Ahmet Lale <>
Submitted on : Sunday, November 20, 2016 - 8:10:31 PM
Last modification on : Friday, January 10, 2020 - 9:10:15 PM
Long-term archiving on: : Tuesday, March 21, 2017 - 1:56:45 AM
Contributor : Ahmet Lale <>
Submitted on : Sunday, November 20, 2016 - 8:10:31 PM
Last modification on : Friday, January 10, 2020 - 9:10:15 PM
Long-term archiving on: : Tuesday, March 21, 2017 - 1:56:45 AM
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