Development of TEM and SEM high brightness electron guns using cold-field emission from a carbon nanotip

Florent Houdellier (1) , Ludvig de Knoop (1) , Christophe Gatel (1) , Aurélien Masseboeuf (1) , S Mamishin (2) , Y Taniguchi (2) , Marc Delmas (1) , Marc Monthioux (1) , Martin Hÿtch (1) , Etienne Snoeck (1)

1 CEMES - Centre d'élaboration de matériaux et d'études structurales
2 Hitachi

A newly developed carbon cone nanotip (CCnT) has been used as field emission cathode both in low voltage SEM (30 kV) electron source and high voltage TEM (200 kV) electron source. The results clearly show, for both technologies, an unprecedented stability of the emission and the probe current with almost no decay during 1 h, as well as a very small noise (rms less than 0.5%) compared to standard sources which use tungsten tips as emitting cathode. In addition, quantitative electric field mapping around the FE tip have been performed using in situ electron holography experiments during the emission of the new tip. These results show the advantage of the very high aspect ratio of the new CCnT which induces a strong enhancement of the electric field at the apex of the tip, leading to very small extraction voltage (some hundred of volts) for which the field emission will start. The combination of these experiments with emission current measurements has also allowed to extract an exit work function value of 4.8 eV.

Domaines: Physique [physics]

Florent Houdellier, Ludvig de Knoop, Christophe Gatel, Aurélien Masseboeuf, S Mamishin, et al.. Development of TEM and SEM high brightness electron guns using cold-field emission from a carbon nanotip. Ultramicroscopy, 2015, 151, pp.107--115. ⟨10.1016/j.ultramic.2014.11.021⟩. ⟨hal-01430585⟩