Full system for piezoelectric organic MEMS resonators operating in liquid media

Pierre-Henri Ducrot (1) , Isabelle Dufour (1) , Liviu Nicu (2) , Fabrice Mathieu (3) , Cédric Ayela (1)

1 IMS - Laboratoire de l'intégration, du matériau au système
2 LAAS-MEMS - Équipe Microsystèmes électromécaniques
3 LAAS-I2C - Service Instrumentation Conception Caractérisation

Here is presented a full compact system enabling the integrated actuation and measurement of the resonance frequency of piezoelectric organic MEMS resonators in liquid media. The resonators contain a piezoelectric layer made of PVDF-TrFE for both the actuation and the readout of the MEMS. They are included into a watertight enclosure associated with a PCB and a dedicated electronic card, allowing electrical measurements in air and liquid media. An application for viscosity measurements of water/glycerol mixtures is presented and shows that results match with measurements made with a viscometer, without any knowledge of the mass density.

Mots clés: Organic Piezoelectric MEMS; Measuring System; Liquid Media; Resonance Frequency; Viscosity

Domaines: Micro et nanotechnologies/Microélectronique

Pierre-Henri Ducrot, Isabelle Dufour, Liviu Nicu, Fabrice Mathieu, Cédric Ayela. Full system for piezoelectric organic MEMS resonators operating in liquid media. Transducers 2017, The 19th International Conference on Solid-State Sensors, Actuators and Microsystems, Jun 2017, Kaohsiung, Taiwan. pp.1372-1375, ⟨10.1109/TRANSDUCERS.2017.7994312⟩. ⟨hal-01500133⟩