Bessem Kaghouche, Farida Mansour, Christine Molliet, Bernard Rousset, Pierre Temple-Boyer. Investigation on optical and physico-chemical properties of LPCVD SiOxNy thin films.
European Physical Journal: Applied Physics, EDP Sciences, 2014, 66 (2), pp.20301.
⟨10.1051/epjap.2014130550⟩.
⟨hal-01504952⟩