Parallel detection in liquid phase of N-channel MOSFET/ChemFET microdevices using saturation mode

Florian Larramendy (1) , Fabrice Mathieu (1) , Samuel Charlot (1) , Liviu Nicu (1) , Pierre Temple-Boyer (2)

1 LAAS - Laboratoire d'analyse et d'architecture des systèmes
2 LAAS-MICA - Équipe MICrosystèmes d'Analyse

MOSFET and ChemFET are currently being used in many types of applications for the measurement of electrochemical potential and pH in liquid phase. This paper presents the realization of an analysis micro device including the micro sensor chip, the on-board electronic and the associated fluidics. The whole micro system can be easily transported, used for cellular cultures monitoring or chemical test thanks to a specific electronic interface. Using the transistor saturation mode, this interface enables both static and dynamic measurements for ChemFET and MOSFET-based devices, reducing electrical measurement interferences (up to 50dB) coming from the liquid phase.

Mots clés: MOSFET; ChemFET; dynamic measurements; on board electronics

Domaines: Micro et nanotechnologies/Microélectronique

Florian Larramendy, Fabrice Mathieu, Samuel Charlot, Liviu Nicu, Pierre Temple-Boyer. Parallel detection in liquid phase of N-channel MOSFET/ChemFET microdevices using saturation mode. Sensors and Actuators B: Chemical, 2013, 176, pp.379-385. ⟨10.1016/j.snb.2012.09.091⟩. ⟨hal-01508106⟩