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Journal articles
Three-dimensional closed microfluidic channel fabrication by stepper projection single step lithography: the diabolo effect
Abstract : Microfluidic devices are currently being used in many types of biochemical microsystems for the liquid phase analysis in the frame of medical applications. This paper presents a new technique for the realization of microfluidic channels using SU-8, a commonly used epoxy-based negative photo-resist. These microchannels were fabricated owing to a single stepper UV-photolithography process. By changing the process parameters, e.g. the optical focus depth and the UV exposure dose, well-defined, covered microchannels with various dimensions and aspect ratios were realized and proven to be effective for the fluid transport by capillarity. This technique can easily be used for the fabrication of microfluidic devices in microanalysis and lab-on-chip applications realm.
Cited literature [12 references]
https://hal.laas.fr/hal-01511362
Contributor : Pierre Temple-Boyer <>
Submitted on : Thursday, April 20, 2017 - 6:49:10 PM
Last modification on : Friday, January 10, 2020 - 9:10:15 PM
Long-term archiving on: : Friday, July 21, 2017 - 1:54:41 PM
Contributor : Pierre Temple-Boyer <>
Submitted on : Thursday, April 20, 2017 - 6:49:10 PM
Last modification on : Friday, January 10, 2020 - 9:10:15 PM
Long-term archiving on: : Friday, July 21, 2017 - 1:54:41 PM
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manuscript_SU8-3D.pdf
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