Three-dimensional closed microfluidic channel fabrication by stepper projection single step lithography: the diabolo effect

Florian Larramendy 1 Laurent Mazenq 2 Pierre Temple-Boyer 1 Liviu Nicu 3
1 LAAS-MICA - Équipe MICrosystèmes d'Analyse
LAAS - Laboratoire d'analyse et d'architecture des systèmes
2 LAAS-TEAM - Service Techniques et Équipements Appliqués à la Microélectronique
LAAS - Laboratoire d'analyse et d'architecture des systèmes
3 LAAS-NBS - Équipe NanoBioSystèmes
LAAS - Laboratoire d'analyse et d'architecture des systèmes
Abstract : Microfluidic devices are currently being used in many types of biochemical microsystems for the liquid phase analysis in the frame of medical applications. This paper presents a new technique for the realization of microfluidic channels using SU-8, a commonly used epoxy-based negative photo-resist. These microchannels were fabricated owing to a single stepper UV-photolithography process. By changing the process parameters, e.g. the optical focus depth and the UV exposure dose, well-defined, covered microchannels with various dimensions and aspect ratios were realized and proven to be effective for the fluid transport by capillarity. This technique can easily be used for the fabrication of microfluidic devices in microanalysis and lab-on-chip applications realm.
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https://hal.laas.fr/hal-01511362
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LAAS | CNRS | INSA-TOULOUSE | LAAS-MICRO-NANO-BIO-TECHNOLOGIES | LAAS-MICA | LAAS-TEAM | LAAS-NBS | INSA-GROUPE | UNIV-TLSE3 | UT1-CAPITOLE | UNIV-TLSE2

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Florian Larramendy, Laurent Mazenq, Pierre Temple-Boyer, Liviu Nicu. Three-dimensional closed microfluidic channel fabrication by stepper projection single step lithography: the diabolo effect. Lab on a Chip, Royal Society of Chemistry, 2012, 12 (2), pp.387-390. ⟨10.1039/C1LC20810A⟩. ⟨hal-01511362⟩

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