Highly reliable copper dual-damascene interconnects with self-formed MnSi/sub x/O/sub y/ barrier Layer, IEEE Transactions on Electron Devices, vol.53, issue.10, pp.2492-2499, 2006. ,
DOI : 10.1109/TED.2006.882046
Non-Aqueous Routes to Metal Oxide Thin Films by Atomic Layer Deposition, Angewandte Chemie International Edition, vol.18, issue.19, pp.3592-3595, 2008. ,
DOI : 10.1002/anie.200705550
Atomic Layer Deposition Chemistry: Recent Developments and Future Challenges, Angewandte Chemie International Edition, vol.42, issue.45, pp.5548-5554, 2003. ,
DOI : 10.1002/anie.200301652
Precursor design and reaction mechanisms for the atomic layer deposition of metal films, Coordination Chemistry Reviews, vol.257, issue.23-24, pp.3271-3281, 2013. ,
DOI : 10.1016/j.ccr.2013.03.028
Influences of metal, non-metal precursors, and substrates on atomic layer deposition processes for the growth of selected functional electronic materials, Coordination Chemistry Reviews, vol.257, issue.23-24, pp.3154-3176, 2013. ,
DOI : 10.1016/j.ccr.2013.04.010
Synthesis and Characterization of Volatile, Thermally Stable, Reactive Transition Metal Amidinates, Inorganic Chemistry, vol.42, issue.24, pp.7951-7958, 2003. ,
DOI : 10.1021/ic0345424
Impact of the Unique Physical Properties of Copper in Silicon on Characterization of Copper Diffusion Barriers, physica status solidi (b), vol.12, issue.38, pp.261-277, 2000. ,
DOI : 10.1016/S0921-4526(99)00500-1
Structural and Electronic Properties of a Mn Oxide Diffusion Barrier Layer Formed by Chemical Vapor Deposition, IEEE Transactions on Device and Materials Reliability, vol.11, issue.2, pp.295-302, 2011. ,
DOI : 10.1109/TDMR.2011.2141671
Solid-state NMR spectra of paramagnetic silica-based materials: observation of29Si and27Al nuclei in the first coordination spheres of manganese ions, Magnetic Resonance in Chemistry, vol.37, issue.45, pp.861-867, 2006. ,
DOI : 10.1002/0470094486.ch12
Strategies for Solid-State NMR Studies of Materials: From Diamagnetic to Paramagnetic Porous Solids, Chemical Reviews, vol.111, issue.2, pp.530-562, 2011. ,
DOI : 10.1021/cr100144r
The Effect of Bulk Magnetic Susceptibility on Solid State NMR Spectra of Paramagnetic Compounds, Journal of Magnetic Resonance, vol.133, issue.2, pp.330-340, 1998. ,
DOI : 10.1006/jmre.1998.1473
carbon doped oxide surfaces during the growth of Mn silicate barrier layers, Journal of Applied Physics, vol.110, issue.12, p.124512, 2011. ,
DOI : 10.1002/sia.v33:8
Self-forming diffusion barrier layer in Cu???Mn alloy metallization, Applied Physics Letters, vol.31, issue.4, p.41911, 2005. ,
DOI : 10.1063/1.1365418