Vertical integration of an electro-absorption modulator within a VCSEL device

Ludovic Marigo-Lombart 1 Alexandre Arnoult 2 Christophe Viallon 3 Stéphane Calvez 4 Aurélie Lecestre 2 Benjamin Reig 2 Alexandre Rumeau 5 Hugo Thienpont 1 Krassimir Panajotov 1 Guilhem Almuneau 4
1 TONA - Department of Applied Physics and Photonics [Brussels]
2 LAAS-TEAM - Service Techniques et Équipements Appliqués à la Microélectronique
LAAS - Laboratoire d'analyse et d'architecture des systèmes
3 LAAS-MOST - Équipe Microondes et Opto-microondes pour Systèmes de Télécommunications
LAAS - Laboratoire d'analyse et d'architecture des systèmes
4 LAAS-PHOTO - Équipe Photonique
LAAS - Laboratoire d'analyse et d'architecture des systèmes
5 LAAS-I2C - Service Instrumentation Conception Caractérisation
LAAS - Laboratoire d'analyse et d'architecture des systèmes
Abstract : The huge increase of datacom traffic requires laser sources of ever-widening modulation bandwidth. Vertical-Cavity Surface-Emitting Lasers (VCSEL) are strategically relevant given that their wide use for short communication links such as in datacenters and are, in light of recent developments, good candidates to address such demands. We propose to increase the modulation bandwidth by vertically integrating a continuous-wave VCSEL with a high-speed electroabsorption modulator (EAM-VCSEL). We will present our studies on the electrical and optical designs, on the development of optimized fabrication steps and on the microwave characterizations leading to the realization of integrated EAM-VCSEL devices.
Keywords : High-frequency modulation Vertical Cavity Lasers Electro-absorption modulator Self-aligned technological processing BCB planarization
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Conference papers
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https://hal.laas.fr/hal-01610911
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Submitted on : Thursday, October 5, 2017 - 10:43:56 AM
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Ludovic Marigo-Lombart, Alexandre Arnoult, Christophe Viallon, Stéphane Calvez, Aurélie Lecestre, et al.. Vertical integration of an electro-absorption modulator within a VCSEL device. 19th International Conference on Transparent Optical Networks (ICTON 2017), Jul 2017, Girone, Spain. pp.1 - 4, ⟨10.1109/ICTON.2017.8024894⟩. ⟨hal-01610911⟩

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