Vertically Coupled Microdisk Resonators Using AlGaAs/AlOx Technology

Stéphane Calvez (1) , Gael Lafleur (1) , Alexandre Larrue (1) , Pierre-François Calmon (2) , Alexandre Arnoult (2) , Guilhem Almuneau (1) , Olivier Gauthier-Lafaye (1)

1 LAAS-PHOTO - Équipe Photonique
2 LAAS-TEAM - Service Techniques et Équipements Appliqués à la Microélectronique

In this letter, we report the first experimental demonstration of micro-disk resonators that are vertically-coupled to their buried access waveguides on III-V semiconductor epitaxial structures using an original fabrication process. The here-proposed and validated three-dimensional integration scheme exploits selective lateral thermal oxidation of aluminium-rich AlGaAs layers. Compared to the previously reported processing techniques, this new scheme is simpler as it does not require any planarization or substrate transfer steps. As a proof-of-principle demonstration of this approach, 250 µm-diameter micro-disk devices exhibiting quality factor reaching ~8500 have been successfully fabricated.

Mots clés: monolithic integration; optical resonator; vertical coupling; AlOx; oxidation; GaAs; whispering gallery modes

Domaines: Optique [physics.optics]; Optique / photonique; Micro et nanotechnologies/Microélectronique

Stéphane Calvez, Gael Lafleur, Alexandre Larrue, Pierre-François Calmon, Alexandre Arnoult, et al.. Vertically Coupled Microdisk Resonators Using AlGaAs/AlOx Technology. IEEE Photonics Technology Letters, 2015, 27 (9), pp.982 - 985. ⟨10.1109/LPT.2015.2405031⟩. ⟨hal-01612502⟩