Method for improving the electrical insulating properties of wet thermal oxide of AlAsSb on GaSb substrates

Y. Laaroussi , J. B. Doucet , P. Fadel , L. Cerutti (1, 2) , I. Suarez , Adnen Mlayah (3) , Guilhem Almuneau (1)

1 IES - Institut d’Electronique et des Systèmes
2 NANOMIR - Composants à Nanostructure pour le moyen infrarouge
3 Laboratoire Physique des Solides de Toulouse

Domaines: Electronique

Y. Laaroussi, J. B. Doucet, P. Fadel, L. Cerutti, I. Suarez, et al.. Method for improving the electrical insulating properties of wet thermal oxide of AlAsSb on GaSb substrates. Applied Physics Letters, 2013, 103 (10), ⟨10.1063/1.4820436⟩. ⟨hal-01621430⟩