Uniform Fabrication of Moems Arrays Using Dry Thick Resist Films

Thierry Camps (1) , Sami Abada (1) , Benjamin Reig (2) , Jean-Baptiste Doucet (2) , Rémi Courson (2) , Laurène Salvi (1) , Benjamin Boisnard (1) , Emmanuelle Daran (2) , Véronique Bardinal (1)

1 LAAS-MICA - Équipe MICrosystèmes d'Analyse
2 LAAS-TEAM - Service Techniques et Équipements Appliqués à la Microélectronique

This study aims at focusing a laser beam at the center of a microfluidic channel for optical bio-sensing applications thanks to the collective integration of tunable microlens arrays on VCSELs devices. High aspect-ratio polymer-based MOEMS are successfully fabricated on small-sized samples using thick dry photoresist films. Such dry films are easier to use and less expensive than standard thick SU-8 and can be efficiently stacked on fragile GaAs samples using a soft-thermal-printing technique. By combining double UV exposure and planar metallization, uniform fabrication of MOEMS arrays is enabled and fabricated devices exhibit reproducible electro-thermal behavior.

Mots clés: MOEMS; micro-optics; dry thick resist film; SU-8; wafer-scale fabrication; VCSELs; dynamic beam shaping

Domaines: Optique / photonique; Micro et nanotechnologies/Microélectronique; Matériaux; Electronique

Thierry Camps, Sami Abada, Benjamin Reig, Jean-Baptiste Doucet, Rémi Courson, et al.. Uniform Fabrication of Moems Arrays Using Dry Thick Resist Films. Proceedings, 2017, 1 (4), pp.551. ⟨10.3390/proceedings1040551⟩. ⟨hal-01634255⟩