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Uniform Fabrication of Moems Arrays Using Dry Thick Resist Films

Abstract : This study aims at focusing a laser beam at the center of a microfluidic channel for optical bio-sensing applications thanks to the collective integration of tunable microlens arrays on VCSELs devices. High aspect-ratio polymer-based MOEMS are successfully fabricated on small-sized samples using thick dry photoresist films. Such dry films are easier to use and less expensive than standard thick SU-8 and can be efficiently stacked on fragile GaAs samples using a soft-thermal-printing technique. By combining double UV exposure and planar metallization, uniform fabrication of MOEMS arrays is enabled and fabricated devices exhibit reproducible electro-thermal behavior.
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Submitted on : Thursday, January 11, 2018 - 9:26:39 AM
Last modification on : Tuesday, December 8, 2020 - 10:11:13 AM
Long-term archiving on: : Friday, May 4, 2018 - 1:37:38 PM


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Thierry Camps, Sami Abada, Benjamin Reig, Jean-Baptiste Doucet, Rémi Courson, et al.. Uniform Fabrication of Moems Arrays Using Dry Thick Resist Films. Proceedings, MDPI, 2017, 1 (4), pp.551. ⟨10.3390/proceedings1040551⟩. ⟨hal-01634255⟩



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