Fabrication of polymer-based optical microsystem arrays suited for the active focusing of vertical laser diodes, Journal of Micromechanics and Microengineering, vol.22, issue.6, p.65006, 2012. ,
DOI : 10.1088/0960-1317/22/6/065006
Optical feedback interferometry for microscale-flow sensing study: numerical simulation and experimental validation, Optics Express, vol.24, issue.21, pp.23849-23862, 2016. ,
DOI : 10.1364/OE.24.023849
URL : https://hal.archives-ouvertes.fr/hal-01446494
3D optimization of a polymer MOEMS for active focusing of VCSEL beam, Proc. SPIE 9130, Micro-Optics 2014, p.913003, 2014. ,
Low-cost multilevel microchannel lab on chip: DF-1000 series dry film photoresist as a promising enabler, RSC Adv., vol.12, issue.97, pp.54847-54853 ,
DOI : 10.1039/c2lc21015k
URL : https://hal.archives-ouvertes.fr/hal-01082670
Comparative study of soft thermal printing and lamination of dry thick photoresist films for the uniform fabrication of polymer MOEMS on small-sized samples, 2017) © 2017 by the authors. Submitted for possible open access publication under the terms and conditions of the Creative Commons Attribution (CC BY) license ,
DOI : 10.1088/1361-6439/aa6a27
URL : https://hal.archives-ouvertes.fr/hal-01677496