Comparative study of soft thermal printing and lamination of dry thick photoresist films for the uniform fabrication of polymer MOEMS on small-sized samples

Sami Abada 1 Laurène Salvi 1 Rémi Courson 2 Emmanuelle Daran 2 Benjamin Reig 2 Jean-Baptiste Doucet 2 Thierry Camps 1 Véronique Bardinal 1
1 LAAS-MICA - Équipe MICrosystèmes d'Analyse
LAAS - Laboratoire d'analyse et d'architecture des systèmes
2 LAAS-TEAM - Service Techniques et Équipements Appliqués à la Microélectronique
LAAS - Laboratoire d'analyse et d'architecture des systèmes
Abstract : A method called " soft thermal printing " (STP) was developed to ensure the optimal transfer of 50-µm-thick dry epoxy resist films (DF-1050) on small-sized samples. The aim was the uniform fabrication of high aspect ratio polymer-based MOEMS (micro-optical-electrical-mechanical system) on small and/or fragile samples, such as GaAs. The printing conditions were optimized, and the resulting thickness uniformity profiles were compared to those obtained via lamination and SU-8 standard spin-coating. Under the best conditions tested, STP and lamination produced similar results, with a maximum deviation to the central thickness of 3% along the sample surface, compared to greater than 40% for SU-8 spin-coating. Both methods were successfully applied to the collective fabrication of DF1050-based MOEMS designed for the dynamic focusing of VCSELs (vertical-cavity surface-emitting lasers). Similar, efficient electro-thermo-mechanical behaviour was obtained in both cases. 2
Keywords : SU-8 dry thick resist film thickness uniformity lamination wafer-scale fabrication MOEMS micro-optics
Document type :
Journal articles
Complete list of metadatas

Cited literature [25 references]  Display  Hide  Download
https://hal.archives-ouvertes.fr/hal-01677496
Contributor : Véronique Bardinal <>
Submitted on : Monday, January 8, 2018 - 1:56:22 PM
Last modification on : Friday, January 10, 2020 - 9:10:15 PM
Long-term archiving on: Wednesday, May 23, 2018 - 3:45:26 PM

File

article_postprint.pdf
Files produced by the author(s)

Identifiers

Collections

CNRS | INSA-TOULOUSE | LAAS-MICA | LAAS-MICRO-NANO-BIO-TECHNOLOGIES | LAAS-TEAM | LAAS | INSA-GROUPE | UNIV-TLSE3 | UT1-CAPITOLE | UNIV-TLSE2

Citation

Sami Abada, Laurène Salvi, Rémi Courson, Emmanuelle Daran, Benjamin Reig, et al.. Comparative study of soft thermal printing and lamination of dry thick photoresist films for the uniform fabrication of polymer MOEMS on small-sized samples. Journal of Micromechanics and Microengineering, IOP Publishing, 2017, 27 (5), pp.055018. ⟨10.1088/1361-6439/aa6a27⟩. ⟨hal-01677496⟩

Export

BibTeX TEI DC DCterms EndNote

Share

Metrics

Record views

242

Files downloads

624

CONTACT

scd.ao@univ-tlse3.fr