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Journal articles
Comparative study of soft thermal printing and lamination of dry thick photoresist films for the uniform fabrication of polymer MOEMS on small-sized samples
Abstract : A method called " soft thermal printing " (STP) was developed to ensure the optimal transfer of 50-µm-thick dry epoxy resist films (DF-1050) on small-sized samples. The aim was the uniform fabrication of high aspect ratio polymer-based MOEMS (micro-optical-electrical-mechanical system) on small and/or fragile samples, such as GaAs. The printing conditions were optimized, and the resulting thickness uniformity profiles were compared to those obtained via lamination and SU-8 standard spin-coating. Under the best conditions tested, STP and lamination produced similar results, with a maximum deviation to the central thickness of 3% along the sample surface, compared to greater than 40% for SU-8 spin-coating. Both methods were successfully applied to the collective fabrication of DF1050-based MOEMS designed for the dynamic focusing of VCSELs (vertical-cavity surface-emitting lasers). Similar, efficient electro-thermo-mechanical behaviour was obtained in both cases. 2
Cited literature [25 references]
https://hal.archives-ouvertes.fr/hal-01677496
Contributor : Véronique Bardinal <>
Submitted on : Monday, January 8, 2018 - 1:56:22 PM
Last modification on : Friday, January 10, 2020 - 9:10:15 PM
Long-term archiving on: : Wednesday, May 23, 2018 - 3:45:26 PM
Contributor : Véronique Bardinal <>
Submitted on : Monday, January 8, 2018 - 1:56:22 PM
Last modification on : Friday, January 10, 2020 - 9:10:15 PM
Long-term archiving on: : Wednesday, May 23, 2018 - 3:45:26 PM
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