Optical Feedback Interferometry for Raster Scan Profilometry

Bastien Grimaldi (1) , Antonio Luna Arriaga (1) , Francis Bony (1) , Clément Tronche (2) , Julien Perchoux (1)

1 LAAS-OSE - Équipe Optoélectronique pour les Systèmes Embarqués
2 LAAS-I2C - Service Instrumentation Conception Caractérisation

This paper evaluates optical feedback interferome-try for raster scan profilometry applications. It is shown both experimentally and theoretically that the spot size on target plays a major role as the phase distribution of the scattering contributions impacts drastically the sensor signal.

Mots clés: Laser sensor; profilometry; optical feedback interferometry

Domaines: Optique / photonique; Electronique

Bastien Grimaldi, Antonio Luna Arriaga, Francis Bony, Clément Tronche, Julien Perchoux. Optical Feedback Interferometry for Raster Scan Profilometry. IEEE Sensors 2017, Oct 2017, Glasgow, United Kingdom. 3p. ⟨hal-01685167⟩