Determination of the effective mass and stiffness of a micro resonator from a single optical characterization

Adhitya Bhaswara (1) , Denis Dezest (1) , Liviu Nicu (1) , Thierry Leichle (1) , Bernard Legrand (1)

1 LAAS-NBS - Équipe NanoBioSystèmes

We propose a method for the experimental determination of the effective mass and stiffness of a micro mechanical resonator using optical interferometry in a Fabry-Perot configuration. The method relies on the spectral analysis of the photodiode signal, which is ruled by the Jacobi-Anger expansion, allowing the absolute calibration of the vibration amplitude. Effective parameters are then calculated from the thermomechanical noise spectrum of the resonator. As an example of application, the method is applied to the determination of the effective parameters of an AFM probe.

Domaines: Micro et nanotechnologies/Microélectronique

Adhitya Bhaswara, Denis Dezest, Liviu Nicu, Thierry Leichle, Bernard Legrand. Determination of the effective mass and stiffness of a micro resonator from a single optical characterization. TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference, Jun 2015, Anchorage, United States. pp.2200-2203, ⟨10.1109/TRANSDUCERS.2015.7181397⟩. ⟨hal-01687809⟩