Theoretical studies of the spin coating process for the deposition of polymer-based Maxwellian liquids

Pierre Temple-Boyer 1 Laurent Mazenq 2 Jean-Baptiste Doucet 2 Véronique Conédéra 2 Benoit Torbiero 1 Jérôme Launay 1
1 LAAS-MICA - Équipe MICrosystèmes d'Analyse
LAAS - Laboratoire d'analyse et d'architecture des systèmes
2 LAAS-TEAM - Service Techniques et Équipements Appliqués à la Microélectronique
LAAS - Laboratoire d'analyse et d'architecture des systèmes
Abstract : This paper deals with the study of spin coating processes for the deposition of polysiloxane-based thin films. Specific developments are proposed in order to adapt the hydrodynamic laws theory to the spin coating of Maxwellian liquids. Theoretical and experimental results are compared, evidencing a good fit and enabling to define the Maxwellian law for the studied polysiloxane polymer. Finally, the theoretical developments are successfully extended to the BCB 4026 and SU-8 3050 photosensitive resins.
Keywords : Maxwellian liquids spin coating polysiloxane BCB resin SU-8 resin 2
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https://hal.laas.fr/hal-01687852
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LAAS | CNRS | INSA-TOULOUSE | LAAS-MICA | LAAS-TEAM | LAAS-MICRO-NANO-BIO-TECHNOLOGIES | INSA-GROUPE | UNIV-TLSE3 | UT1-CAPITOLE | UNIV-TLSE2

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Pierre Temple-Boyer, Laurent Mazenq, Jean-Baptiste Doucet, Véronique Conédéra, Benoit Torbiero, et al.. Theoretical studies of the spin coating process for the deposition of polymer-based Maxwellian liquids. Microelectronic Engineering, Elsevier, 2010, 87 (2), pp.163-166. ⟨10.1016/j.mee.2009.06.030⟩. ⟨hal-01687852⟩

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