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Journal articles
Theoretical studies of the spin coating process for the deposition of polymer-based Maxwellian liquids
Abstract : This paper deals with the study of spin coating processes for the deposition of polysiloxane-based thin films. Specific developments are proposed in order to adapt the hydrodynamic laws theory to the spin coating of Maxwellian liquids. Theoretical and experimental results are compared, evidencing a good fit and enabling to define the Maxwellian law for the studied polysiloxane polymer. Finally, the theoretical developments are successfully extended to the BCB 4026 and SU-8 3050 photosensitive resins.
Cited literature [25 references]
https://hal.laas.fr/hal-01687852
Contributor : Pierre Temple-Boyer <>
Submitted on : Thursday, January 18, 2018 - 6:51:49 PM
Last modification on : Friday, January 10, 2020 - 9:10:15 PM
Long-term archiving on: : Thursday, May 24, 2018 - 1:35:53 AM
Contributor : Pierre Temple-Boyer <>
Submitted on : Thursday, January 18, 2018 - 6:51:49 PM
Last modification on : Friday, January 10, 2020 - 9:10:15 PM
Long-term archiving on: : Thursday, May 24, 2018 - 1:35:53 AM
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paper_spincoating.pdf
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