Pierre Temple-Boyer, Laurent Mazenq, Jean-Baptiste Doucet, Véronique Conédéra, Benoit Torbiero, et al.. Theoretical studies of the spin coating process for the deposition of polymer-based Maxwellian liquids.
Microelectronic Engineering, Elsevier, 2010, 87 (2), pp.163-166.
⟨10.1016/j.mee.2009.06.030⟩.
⟨hal-01687852⟩