Love wave gas sensor based on DWNTs sensitive material

H. Hallil (1) , Q. Zhang (2, 3) , E. Flahaut (4) , J L Lachaud (1) , P. Coquet (3, 5) , C. Dejous (1) , D. Rebière (1)

1 IMS - Laboratoire de l'intégration, du matériau au système
2 NTU - Nanayang Technological University
3 CINTRA - CNRS International - NTU - Thales Research Alliance
4 CIRIMAT - Centre interuniversitaire de recherche et d'ingenierie des matériaux
5 IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520

This work focuses on the application related to the detection of low moisture and environmental pollutants. A novel gas sensor with inkjet printed Double Walled Carbon Nano Tubes (DWNTs) on a Love wave sensor platform was developed for Volatile Organic Compounds (VOCs) and humidity detection application. The experiments were conducted in real-time at ambient conditions. Results demonstrate the adsorption of vapor compounds on DWNTs sensitive material and leads for example to frequency shifts of 1.97 kHz and 2.93 kHz with 120 ppm of ethanol vapor and 6.22 % RH, respectively.

Mots clés: Love wave device; gas sensor; SH-SAW platform; CNTs; DWNTs; humidity and VOCs detections

Domaines: Micro et nanotechnologies/Microélectronique; Instrumentations et Détecteurs [physics.ins-det]

H. Hallil, Q. Zhang, E. Flahaut, J L Lachaud, P. Coquet, et al.. Love wave gas sensor based on DWNTs sensitive material. 32nd Symposium on Microelectronics Technology and Devices (SBMicro), Aug 2017, Fortaleza - Ceará, Brazil. ⟨hal-01719018⟩