Local stress-induced effects on AlGaAs/AlOx oxidation front shape

Fares Chouchane (1) , Guilhem Almuneau (1) , Nikolay Cherkashin (2) , Alexandre Arnoult (3) , Guy Lacoste (3) , Chantal Fontaine (1)

1 LAAS-PHOTO - Équipe Photonique
2 CEMES - Centre d'élaboration de matériaux et d'études structurales
3 LAAS-TEAM - Service Techniques et Équipements Appliqués à la Microélectronique

The lateral oxidation of thick AlGaAs layers (>500 nm) is studied. An uncommon shape of the oxide tip is evidenced and attributed to the embedded stress distribution, inherent to the oxidation reaction. Experimental and numerical studies of the internal strain in oxidized AlxGa1−xAs/GaAs structures were carried out by dark-field electron holography and finite element methods. A mapping of the strain distribution around the AlGaAs/oxide interface demonstrates the main role of internal stress on the shaping of the oxide front. These results demonstrate the high relevance of strain in oxide-confined III-V devices, in particular, with over-500-nm thick AlOx confinement layers.

Domaines: Physique [physics]

Fares Chouchane, Guilhem Almuneau, Nikolay Cherkashin, Alexandre Arnoult, Guy Lacoste, et al.. Local stress-induced effects on AlGaAs/AlOx oxidation front shape. Applied Physics Letters, 2014, 105 (4), pp.41909 - 41909. ⟨10.1063/1.4892094⟩. ⟨hal-01721161⟩