Direct Mapping of Strain in a Strained Silicon Transistor by High-Resolution Electron Microscopy

Florian Hüe (1) , Martin Hÿtch (1) , Hugo Bender (2) , Florent Houdellier (1) , Alain Claverie (1)

1 CEMES - Centre d'élaboration de matériaux et d'études structurales
2 IMEC

Aberration-corrected high-resolution transmission electron microscopy (HRTEM) is used to measure strain in a strained-silicon metal-oxide-semiconductor field-effect transistor. Strain components parallel and perpendicular to the gate are determined directly from the HRTEM image by geometric phase analysis. Si 80 Ge 20 source and drain stressors lead to uniaxial compressive strain in the Si channel, reaching a maximum value of ÿ1:3% just below the gate oxide, equivalent to 2.2 GPa. Strain maps obtained by linear elasticity theory, modeled with the finite-element method, agree with the experimental results to within 0.1%.

Mots clés: numbers: 8530De; 0710Pz; 6837Lp; 7765Ly

Domaines: Optique [physics.optics]; Physique des Hautes Energies - Expérience [hep-ex]; Physique Quantique [quant-ph]; Physique des accélérateurs [physics.acc-ph]; Electromagnétisme; Matériaux; Optique / photonique; Traitement du signal et de l'image [eess.SP]

Florian Hüe, Martin Hÿtch, Hugo Bender, Florent Houdellier, Alain Claverie. Direct Mapping of Strain in a Strained Silicon Transistor by High-Resolution Electron Microscopy. Physical Review Letters, 2008, 100 (15), ⟨10.1103/PhysRevLett.100.156602⟩. ⟨hal-01741994⟩