V. Demarne and A. Grisel, An integrated low-power thin-film CO gas sensor on silicon, Sensors and Actuators, vol.13, issue.4, pp.301-313, 1988.
DOI : 10.1016/0250-6874(88)80043-X

J. Courbat, M. Canonica, D. Teyssieux, D. Briand, and N. De-rooijet, Design and fabrication of micro-hotplates made on a polyimide foil: electrothermal simulation and characterization to achieve power consumption in the low mW range, Journal of Micromechanics and Microengineering, vol.21, issue.1, p.15014, 2010.
DOI : 10.1088/0960-1317/21/1/015014
URL : https://hal.archives-ouvertes.fr/hal-00549743

S. Vaihinger and W. Göpel, Chapter 6: Multi-Component Analysis in Chemical Sensing In Sensors Set: A Comprehensive Survey, 1995.

M. K. Sofian, M. E. Oussama, A. A. Imad, and C. K. Marsha, Semiconducting metal oxide based sensors for selective gas pollutant detection, Sensors, vol.9, pp.8158-8196, 2009.

M. Drobek, J. Kim, M. Bechelany, C. Vallicari, A. Julbe et al., MOF-Based Membrane Encapsulated ZnO Nanowires for Enhanced Gas Sensor Selectivity, ACS Applied Materials & Interfaces, vol.8, issue.13, pp.8323-8328, 2016.
DOI : 10.1021/acsami.5b12062
URL : https://hal.archives-ouvertes.fr/hal-01677978

X. Liu, S. Cheng, H. Liu, S. Hu, D. Zhang et al., A Survey on Gas Sensing Technology, Sensors, vol.10, issue.7, pp.9635-9665
DOI : 10.1109/TNANO.2010.2091423

D. Briand and J. Courbat, Chapter 6: Micromachined semiconductor gas sensors, Semiconductor Gas Sensors

W. M. Sears, K. Colbow, and F. Consadori, General characteristics of thermally cycled tin oxide gas sensors, Semiconductor Science and Technology, vol.4, issue.5, pp.351-359, 1989.
DOI : 10.1088/0268-1242/4/5/004

E. Llobet, J. Brezmes, R. Ionescu, X. Vilanova, S. Khalifa et al., Wavelet transform and fuzzy ARTMAP-based pattern recognition for fast gas identification using a micro-hotplate gas sensor, Sensors and Actuators B: Chemical, vol.83, issue.1-3, pp.238-244, 2002.
DOI : 10.1016/S0925-4005(01)01047-4

F. Parret, P. Ménini, A. Martinez, K. Soulantica, A. Maisonnat et al., Improvement of micromachined SnO2 gas sensors selectivity by optimised dynamic temperature operating mode, Sensors and Actuators B: Chemical, vol.118, issue.1-2, pp.276-282, 2006.
DOI : 10.1016/j.snb.2006.04.055

G. Faglia, E. Comini, A. Cristalli, G. Sberveglieri, and L. Dori, Very low power consumption micromachined CO sensors, Sensors and Actuators B: Chemical, vol.55, issue.2-3, pp.140-146, 1999.
DOI : 10.1016/S0925-4005(99)00044-1

N. Dufour, A. Chapelle, C. Talhi, F. Blanc, B. Franc et al., Tuning the bias sensing layer: A new way to greatly improve Metal-Oxide gas sensors selectivity, 2013 Seventh International Conference on Sensing Technology (ICST), pp.3-5, 2013.
DOI : 10.1109/ICSensT.2013.6727608
URL : https://hal.archives-ouvertes.fr/hal-00862798

C. Fong, C. Dai, and C. Wu, Fabrication and Characterization of a Micro Methanol Sensor Using the CMOS-MEMS Technique, Sensors, vol.518, issue.10, pp.27047-27059, 2015.
DOI : 10.1088/0960-1317/15/1/015

C. J. Martinez, B. Hockey, C. B. Montgomery, and S. Semancik, Porous Tin Oxide Nanostructured Microspheres for Sensor Applications, Langmuir, vol.21, issue.17, pp.7937-7944, 2005.
DOI : 10.1021/la050118z

M. Yang and C. Dai, Ethanol Microsensors with a Readout Circuit Manufactured Using the CMOS-MEMS Technique, Sensors, vol.83, issue.1, pp.1623-1634, 2015.
DOI : 10.1016/j.mee.2006.06.006

B. Behera and S. Chandra, An innovative gas sensor incorporating ZnO???CuO nanoflakes in planar MEMS technology, Sensors and Actuators B: Chemical, vol.229, issue.229, pp.414-424
DOI : 10.1016/j.snb.2016.01.079

M. Stankova, P. Ivanov, E. Llobet, J. Brezmes, X. Vilanova et al., Sputtered and screen-printed metal oxide-based integrated micro-sensor arrays for the quantitative analysis of gas mixtures, Sensors and Actuators B: Chemical, vol.103, issue.1-2, pp.23-30, 2004.
DOI : 10.1016/j.snb.2004.02.022

C. Lee, C. Chiang, Y. Wang, and R. Ma, A self-heating gas sensor with integrated NiO thin-film for formaldehyde detection, Sensors and Actuators B: Chemical, vol.122, issue.2, pp.503-510, 2007.
DOI : 10.1016/j.snb.2006.06.018

M. Stankova, X. Vilanova, J. Calderer, E. Llobet, and P. Ivanov, Detection of SO2 and H2S in CO2 stream by means of WO3-based micro-hotplate sensors, Sensors and Actuators B: Chemical, vol.102, issue.2, pp.219-225, 2004.
DOI : 10.1016/j.snb.2004.04.030

Z. Tang, S. K. Fung, D. T. Wong, P. C. Chan, J. K. Sin et al., An integrated gas sensor based on tin oxide thin-film and improved micro-hotplate1Paper presented at the 2nd Asia Conference on Chemical Sensors, Xi'an, P.R. China, 1995.1, Sensors and Actuators B: Chemical, vol.46, issue.3, pp.174-179, 1998.
DOI : 10.1016/S0925-4005(98)00118-X

L. Y. Sheng, Z. Tang, J. Wu, P. C. Chan, and J. K. Sin, A low-power CMOS compatible integrated gas sensor using maskless tin oxide sputtering, Sensors and Actuators B: Chemical, vol.49, issue.1-2, pp.81-87, 1998.
DOI : 10.1016/S0925-4005(98)00092-6

M. Takács, C. Dücs?-o, and A. E. Pap, Fine-tuning of gas sensitivity by modification of nano-crystalline WO 3 layer morphology, Sensors and Actuators B: Chemical, vol.221, pp.281-289
DOI : 10.1016/j.snb.2015.06.081

M. Z. Yang, C. L. Dai, P. J. Shih, and Y. C. Chen, Cobalt oxide nanosheet humidity sensor integrated with circuit on chip, Microelectronic Engineering, vol.88, issue.8, pp.1742-1744, 2011.
DOI : 10.1016/j.mee.2010.12.105

C. L. Dai, Y. C. Chen, C. C. Wu, and C. Kuo, Cobalt Oxide Nanosheet and CNT Micro Carbon Monoxide Sensor Integrated with Readout Circuit on Chip, Sensors, vol.123, issue.112, pp.1753-1764, 2010.
DOI : 10.1016/j.snb.2006.10.055

W. Tang and J. Wang, Methanol sensing micro-gas sensors of SnO2???ZnO nanofibers on Si/SiO2/Ti/Pt substrate via stepwise-heating electrospinning, Journal of Materials Science, vol.185, issue.12, pp.4209-4220, 2015.
DOI : 10.1016/j.snb.2013.05.030

S. Kuhne, M. Graf, A. Tricoli, F. Mayer, S. E. Pratsinis et al., Wafer-level flame-spray-pyrolysis deposition of gas-sensitive layers on microsensors, Journal of Micromechanics and Microengineering, vol.18, issue.3, p.35040, 2008.
DOI : 10.1088/0960-1317/18/3/035040

Q. Wan, Q. H. Li, Y. J. Chen, T. H. Wang, X. L. He et al., Fabrication and ethanol sensing characteristics of ZnO nanowire gas sensors, Applied Physics Letters, vol.84, issue.18, pp.3654-3656, 2004.
DOI : 10.1002/1521-4095(200110)13:19<1468::AID-ADMA1468>3.0.CO;2-O

H. Nguyen, C. T. Quy, N. D. Hoa, N. T. Lam, N. V. Duy et al., Controllable growth of ZnO nanowires grown on discrete islands of Au catalyst for realization of planar-type micro gas sensors, Sensors and Actuators B: Chemical, vol.193, pp.888-894, 2014.
DOI : 10.1016/j.snb.2013.11.043

H. J. Pandya, S. Chandra, and A. L. Vyas, Integration of ZnO nanostructures with MEMS for ethanol sensor, Sensors and Actuators B: Chemical, vol.161, issue.1, pp.923-928, 2011.
DOI : 10.1016/j.snb.2011.11.063

K. Q. Peng, X. Wang, and S. T. Lee, Gas sensing properties of single crystalline porous silicon nanowires, Applied Physics Letters, vol.95, issue.24, pp.95-243112, 2009.
DOI : 10.1021/nl901734e

K. Y. Dong, J. K. Choi, I. S. Hwang, J. W. Lee, B. H. Kang et al., Enhanced H2S sensing characteristics of Pt doped SnO2 nanofibers sensors with micro heater, Sensors and Actuators B: Chemical, vol.157, issue.1, pp.154-161, 2011.
DOI : 10.1016/j.snb.2011.03.043

F. Oudrhiri-hassani, L. Presmanes, A. Barnabé, and P. Tailhades, Microstructure, porosity and roughness of RF sputtered oxide thin films: Characterization and modelization, Applied Surface Science, vol.254, issue.18, pp.5796-5802, 2008.
DOI : 10.1016/j.apsusc.2008.03.149

I. Sandu, L. Presmanes, P. Alphonse, and P. Tailhades, Nanostructured cobalt manganese ferrite thin films for gas sensor application, Thin Solid Films, vol.495, issue.1-2, pp.130-133, 2006.
DOI : 10.1016/j.tsf.2005.08.318
URL : https://hal.archives-ouvertes.fr/hal-00474866

A. Chapelle, I. Younsi, S. Vitale, Y. Thimont, T. Nelis et al., Improved semiconducting CuO/CuFe2O4 nanostructured thin films for CO2 gas sensing, Sensors and Actuators B: Chemical, vol.204, pp.407-413, 2014.
DOI : 10.1016/j.snb.2014.07.088
URL : https://hal.archives-ouvertes.fr/hal-01170563

A. Chapelle, M. Yaacob, I. Pasquet, L. Presmanes, A. Barnabe et al., Structural and gas-sensing properties of CuO???CuxFe3???xO4 nanostructured thin films, Sensors and Actuators B: Chemical, vol.153, issue.1, pp.117-124, 2011.
DOI : 10.1016/j.snb.2010.10.018
URL : https://hal.archives-ouvertes.fr/hal-00717490

L. Presmanes, A. Chapelle, F. Oudrhiri-hassani, and A. Barnabe, Tailhades, P. Synthesis and CO Gas-Sensing Properties of CuO and Spinel Ferrite Nanocomposite Thin Films, Sens. Lett, vol.2013, issue.9, pp.587-590

A. N. Afaah, Z. Khusaimi, and M. Rusop, A Review on Zinc Oxide Nanostructures: Doping and Gas Sensing, Adv. Mater. Res, vol.667, pp.329-332, 2013.

J. Yang, Y. Jiang, L. Li, and M. Gao, Structural, morphological, optical and electrical properties of Ga-doped ZnO transparent conducting thin films Available online, Appl. Surf. Sci, 2016.

Y. Zhou, C. Li, M. A. Huijbregts, and M. M. Mumtaz, Carcinogenic Air Toxics Exposure and Their Cancer-Related Health Impacts in the United States, PLOS ONE, vol.118, issue.10, 2015.
DOI : 10.1371/journal.pone.0140013.s001

K. Sivalingam, P. Shankar, G. K. Mani, and J. B. Rayappan, Solvent volume driven ZnO nanopetals thin films: Spray pyrolysis, Materials Letters, vol.134, pp.47-50, 2014.
DOI : 10.1016/j.matlet.2014.07.019

P. Rai, S. Raj, K. Ko, K. Park, and Y. Yu, Synthesis of flower-like ZnO microstructures for gas sensor applications, Sensors and Actuators B: Chemical, vol.178, pp.107-112, 2013.
DOI : 10.1016/j.snb.2012.12.031

A. Giberti, M. C. Carotta, B. Fabbri, S. Gherardi, V. Guidi et al., High-sensitivity detection of acetaldehyde, Sensors and Actuators B: Chemical, vol.174, issue.174, pp.402-405
DOI : 10.1016/j.snb.2012.08.016

L. Zhang, J. Zhao, H. Lu, L. Gong, L. Li et al., High sensitive and selective formaldehyde sensors based on nanoparticle-assembled ZnO micro-octahedrons synthesized by homogeneous precipitation method, Sensors and Actuators B: Chemical, vol.160, issue.1, pp.364-370, 2011.
DOI : 10.1016/j.snb.2011.07.062

P. Rai, H. Song, Y. Kim, M. Song, P. Oh et al., Microwave assisted hydrothermal synthesis of single crystalline ZnO nanorods for gas sensor application, Materials Letters, vol.68, pp.90-93, 2012.
DOI : 10.1016/j.matlet.2011.10.029

S. Zhang, J. Lim, J. Huh, J. Noh, and W. Lee, Two-step fabrication of ZnO nanosheets for high-performance VOCs gas sensor, Current Applied Physics, vol.13, pp.156-161, 2013.
DOI : 10.1016/j.cap.2012.12.021

J. Du, H. Yao, R. Zhao, H. Wang, Y. Xie et al., Controllable synthesis of prism- and lamella-like ZnO and their gas sensing, Materials Letters, vol.136, pp.427-430, 2014.
DOI : 10.1016/j.matlet.2014.08.077

L. Zhang, J. Zhao, J. Zheng, L. Li, and Z. Zhu, Shuttle-like ZnO nano/microrods: Facile synthesis, optical characterization and high formaldehyde sensing properties, Applied Surface Science, vol.258, issue.2, pp.711-718, 2011.
DOI : 10.1016/j.apsusc.2011.07.116

G. K. Mani and J. B. Rayappan, ZnO nanoarchitectures: Ultrahigh sensitive room temperature acetaldehyde sensor, Sensors and Actuators B: Chemical, vol.223, issue.223, pp.343-351
DOI : 10.1016/j.snb.2015.09.103

J. Xu, J. Han, Y. Zhang, Y. Sun, and B. Xie, Studies on alcohol sensing mechanism of ZnO based gas sensors, Sensors and Actuators B: Chemical, vol.132, issue.1, pp.334-339, 2008.
DOI : 10.1016/j.snb.2008.01.062

S. Shalini and D. Balamurugan, Ambient temperature operated acetaldehyde vapour detection of spray deposited cobalt doped zinc oxide thin film, Journal of Colloid and Interface Science, vol.466, pp.352-359, 2016.
DOI : 10.1016/j.jcis.2015.12.044

M. Hjiri, R. Dhahri, L. Mir, A. Bonavita, N. Donato et al., CO sensing properties of Ga-doped ZnO prepared by sol???gel route, Journal of Alloys and Compounds, vol.634, pp.187-192, 2015.
DOI : 10.1016/j.jallcom.2015.02.083

M. A. Bui, H. Le-trong, L. Presmanes, A. Barnabé, C. Bonningue et al., prepared by radio frequency sputtering ??? the first step towards their spinodal decomposition, CrystEngComm, vol.9, issue.16, pp.3359-3365, 2014.
DOI : 10.1016/0022-3697(59)90206-9
URL : https://hal.archives-ouvertes.fr/hal-01067955

C. Shang, Y. Thimont, A. Barnabe, and L. Presmanes, Detailed microstructure analysis of as-deposited and etched porous ZnO films, Applied Surface Science, vol.344, pp.242-248, 2015.
DOI : 10.1016/j.apsusc.2015.03.097
URL : https://hal.archives-ouvertes.fr/hal-01218614

L. Weber and . Xii, Ein einfacher Ausdruck für das Verhältnis der Netzdichten der Bravaisschen Baumgitter, p.398
DOI : 10.1524/zkri.1923.58.1.220

W. L. Dang, Y. Q. Fu, J. K. Luo, A. J. Flewitt, and W. Milne, Deposition and characterization of sputtered ZnO films, Superlattices and Microstructures, vol.42, issue.1-6, pp.89-93, 2007.
DOI : 10.1016/j.spmi.2007.04.081

Y. Thimont, J. Clatot, M. Nistor, C. Labrugere, and A. Rougier, From ZnF2 to ZnO thin films using pulsed laser deposition: Optical and electrical properties, Solar Energy Materials and Solar Cells, vol.107, pp.136-141, 2012.
DOI : 10.1016/j.solmat.2012.07.008
URL : https://hal.archives-ouvertes.fr/hal-00737910

J. Clatot, G. Campet, A. Zeinert, C. Labrugere, M. Nistor et al., Low temperature Si doped ZnO thin films for transparent conducting oxides, Solar Energy Materials and Solar Cells, vol.95, issue.8, pp.2357-2362, 2011.
DOI : 10.1016/j.solmat.2011.04.006
URL : https://hal.archives-ouvertes.fr/hal-00606548

P. Scherrer, Bestimmung der Grösse und der inneren Struktur von Kolloidteilchen mittels Röntgenstrahlen, J. Nachr. Ges. Wiss. Göttingen, vol.26, pp.98-100, 1918.
DOI : 10.1007/978-3-662-33915-2_7

A. Barnabe, M. Lalanne, L. Presmanes, J. M. Soon, P. Tailhades et al., Structured ZnO-based contacts deposited by non-reactive rf magnetron sputtering on ultra-thin SiO2/Si through a stencil mask, Thin Solid Films, vol.518, issue.4, pp.1044-1047, 2009.
DOI : 10.1016/j.tsf.2009.03.232

M. Lalanne, J. M. Soon, A. Barnabe, and L. Presmanes, Preparation and characterization of the defect???conductivity relationship of Ga-doped ZnO thin films deposited by nonreactive radio-frequency???magnetron sputtering, Journal of Materials Research, vol.25, issue.12, pp.2407-2414, 2010.
DOI : 10.1557/jmr.2010.0300

D. Necas and P. Klapetek, Gwyddion software Available online: http://www.gwyddion.net, 2016.